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Plasma inhomogeneities near the electrodes of a capacitively-coupled radio-frequency discharge containing dust particles

Published online by Cambridge University Press:  28 October 2011

H. Tawidian*
Affiliation:
GREMI, Groupe de Recherches sur l’Energétique des Milieux Ionisés, UMR 6606, CNRS/Université d’Orléans, 14 rue d’Issoudun, BP6744, 45067 Orléans Cedex 2, France
M. Mikikian*
Affiliation:
GREMI, Groupe de Recherches sur l’Energétique des Milieux Ionisés, UMR 6606, CNRS/Université d’Orléans, 14 rue d’Issoudun, BP6744, 45067 Orléans Cedex 2, France
L. Couëdel
Affiliation:
GREMI, Groupe de Recherches sur l’Energétique des Milieux Ionisés, UMR 6606, CNRS/Université d’Orléans, 14 rue d’Issoudun, BP6744, 45067 Orléans Cedex 2, France
T. Lecas
Affiliation:
GREMI, Groupe de Recherches sur l’Energétique des Milieux Ionisés, UMR 6606, CNRS/Université d’Orléans, 14 rue d’Issoudun, BP6744, 45067 Orléans Cedex 2, France
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Abstract

Small plasma spheroids are evidenced and analyzed in front of the electrodes of a capacitively-coupled radio-frequency discharge in which dust particles are growing. These regions are characterized by a spherical shape, a slightly enhanced luminosity and are related to instabilities induced by the presence of dust particles. Several types of behaviors are identified and particularly their chaotic appearance or disappearance and their rotational motion along the electrode periphery. Correlations with the unstable behavior of the global plasma glow are performed. These analyses are obtained thanks to high-speed imaging which is the only diagnostics able to evidence these plasma spheroids.

Type
Research Article
Copyright
© EDP Sciences, 2011

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References

Roth, R.M., Spears, K.G., Stein, G.D., Wong, G., Appl. Phys. Lett. 46, 253 (1985)CrossRef
Selwyn, G.S., Singh, J., Bennett, R.S., J. Vac. Sci. Technol. A 7, 2758 (1989)CrossRef
Shukla, P.K., Eliasson, B., Rev. Mod. Phys. 81, 25 (2009)CrossRef
Mikikian, M., Couëdel, L., Cavarroc, M., Tessier, Y., Boufendi, L., Eur. Phys. J. Appl. Phys. 49, 13106 (2010)CrossRef
Goertz, C.K., Rev. Geophys. 27, 271 (1989)CrossRef
Sciamma-O’Brien, E., Carrasco, N., Szopa, C., Buch, A., Cernogora, G., Icarus 209, 704 (2010)CrossRef
Krasheninnikov, S.I. et al., Plasma Phys. Control. Fusion 50, 124054 (2008)CrossRef
Berndt, J., Kovačević, E., Stefanović, I., Stepanovic, O., Hong, S.H., Boufendi, L., Winter, J., Contrib. Plasma Phys. 49, 107 (2009)CrossRef
Mikikian, M., Cavarroc, M., Couëdel, L., Tessier, Y., Boufendi, L., Pure Appl. Chem. 82, 1273 (2010)CrossRef
Benedikt, J., J. Phys. D: Appl. Phys. 43, 043001 (2010)CrossRef
Pereira, J., Massereau-Guilbaud, V., Géraud-Grenier, I., Plain, A., J. Appl. Phys. 103, 033301 (2008)CrossRef
Cavarroc, M., Mikikian, M., Tessier, Y., Boufendi, L., Phys. Rev. Lett. 100, 045001 (2008)CrossRef
Berndt, J., Kovačević, E., Stefanović, I., Boufendi, L., J. Appl. Phys. 106, 063309 (2009)CrossRef
Dap, S., Lacroix, D., Patisson, F., Hugon, R., de Poucques, L., Bougdira, J., New J. Phys. 12, 093014 (2010)CrossRef
Samsonov, D., Goree, J., Phys. Rev. E 59, 1047 (1999)CrossRef
Dominique, C., Arnas, C., J. Appl. Phys. 101, 123304 (2007)CrossRef
Michau, A., Lombardi, G., Delacqua, L.C., Redolfi, M., Arnas, C., Bonnin, X., Hassouni, K., Plasma Phys. Control. Fusion 52, 124014 (2010)CrossRef
Mikikian, M., Boufendi, L., Bouchoule, A., Thomas, H.M., Morfill, G.E., Nefedov, A.P., Fortov, V.E., the PKE-Nefedov Team, New J. Phys. 5, 19 (2003)CrossRef
Stoffels, W.W., Stoffels, E., Kroesen, G.M.W., de Hoog, F.J., J. Appl. Phys. 78, 4867 (1995)CrossRef
Kersten, H., Deutsch, H., Otte, M., Swinkels, G.H.P.M., Kroesen, G.M.W., Thin Solid Films 377–378, 530 (2000)CrossRef
Mikikian, M., Cavarroc, M., Couëdel, L., Boufendi, L., Phys. Plasmas 13, 092103 (2006)CrossRef
Mikikian, M., Couëdel, L., Cavarroc, M., Tessier, Y., Boufendi, L., IEEE Trans. Plasma Sci. 36, 1012 (2008)CrossRef
Mikikian, M., Couëdel, L., Tessier, Y., Boufendi, L., IEEE Trans. Plasma Sci. (in press), DOI: http://dx.doi.org/10.1109/TPS.2011.2155675
Nefedov, A.P. et al., New J. Phys. 5, 33 (2003)CrossRef
Zhdanov, S.K. et al., New J. Phys. 12, 043006 (2010)CrossRef
Couëdel, L., Mikikian, M., Samarian, A.A., Boufendi, L., Phys. Plasmas 17, 083705 (2010)CrossRef
Mikikian, M., Couëdel, L., Cavarroc, M., Tessier, Y., Boufendi, L., New J. Phys. 9, 268 (2007)CrossRef
Mikikian, M., Couëdel, L., Cavarroc, M., Tessier, Y., Boufendi, L., Phys. Rev. Lett. 105, 075002 (2010)CrossRef
Goree, J., Morfill, G.E., Tsytovich, V.N., Vladimirov, S.V., Phys. Rev. E 59, 7055 (1999)CrossRef
Hu, Z., Chen, Y., Zheng, X., Huang, F., Shi, G.-F., Yu, M.Y., Phys. Plasmas 16, 063707 (2009)CrossRef
Schmidt, C., Arp, O., Piel, A., Phys. Plasmas 18, 013704 (2011)CrossRef
Mikikian, M., Cavarroc, M., Couëdel, L., Tessier, Y., Boufendi, L., Phys. Rev. Lett. 100, 225005 (2008)CrossRef
Schulze, J., Luggenhölscher, D., Czarnetzki, U., IEEE Trans. Plasma Sci. 36, 1402 (2008)CrossRef