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Plasma inhomogeneities near the electrodes of a capacitively-coupled radio-frequency discharge containing dust particles

Published online by Cambridge University Press:  28 October 2011

H. Tawidian ,
M. Mikikian ,
L. Couëdel  and
T. Lecas
H. Tawidian*
Affiliation:
GREMI, Groupe de Recherches sur l’Energétique des Milieux Ionisés, UMR 6606, CNRS/Université d’Orléans, 14 rue d’Issoudun, BP6744, 45067 Orléans Cedex 2, France
M. Mikikian*
Affiliation:
GREMI, Groupe de Recherches sur l’Energétique des Milieux Ionisés, UMR 6606, CNRS/Université d’Orléans, 14 rue d’Issoudun, BP6744, 45067 Orléans Cedex 2, France
L. Couëdel
Affiliation:
GREMI, Groupe de Recherches sur l’Energétique des Milieux Ionisés, UMR 6606, CNRS/Université d’Orléans, 14 rue d’Issoudun, BP6744, 45067 Orléans Cedex 2, France
T. Lecas
Affiliation:
GREMI, Groupe de Recherches sur l’Energétique des Milieux Ionisés, UMR 6606, CNRS/Université d’Orléans, 14 rue d’Issoudun, BP6744, 45067 Orléans Cedex 2, France
*
ae-mail: hagop.tawidian@univ-orleans.fr
be-mail: maxime.mikikian@univ-orleans.fr
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Abstract

Small plasma spheroids are evidenced and analyzed in front of the electrodes of a capacitively-coupled radio-frequency discharge in which dust particles are growing. These regions are characterized by a spherical shape, a slightly enhanced luminosity and are related to instabilities induced by the presence of dust particles. Several types of behaviors are identified and particularly their chaotic appearance or disappearance and their rotational motion along the electrode periphery. Correlations with the unstable behavior of the global plasma glow are performed. These analyses are obtained thanks to high-speed imaging which is the only diagnostics able to evidence these plasma spheroids.

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 56 , Issue 2: Topical Issue: 18th International Colloquium on Plasma Processes (CIP 2011) , November 2011 , 24018
Copyright
© EDP Sciences, 2011

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