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Deformations induced by a Vickers indentor in InP at room temperature

Published online by Cambridge University Press:  15 October 2000

E. Le Bourhis  and
G. Patriarche
E. Le Bourhis
Affiliation:
Université de Poitiers, Laboratoire de Métallurgie Physique (UMR 6630 CNRS), SP2MI, Téléport 2, boulevard Marie et Pierre Curie, BP 30179, 86962 Futuroscope-Chasseneuil Cedex, France
G. Patriarche
Affiliation:
France Telecom (URA 250 CNRS), 196 avenue Henri Ravéra, Laboratoire Concepts des Dispositifs pour la Photonique, BP 107, 92225 Bagneux Cedex, France
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Abstract

(001) surfaces of indium phosphide (InP) single crystals have been deformed at room temperature by a Vickers indenter. The indents formed were observed by transmission electron microscopy (TEM) in plan views as well as in cross-sectional views obtained by focused-ion beam (FIB) milling. The in-depth structure of the plastic zone has been investigated as well as the dislocation arrangements. The polarity of the crystal was determined by convergent beam electron diffraction (CBED) and the plastic anisotropy was discussed.

Keywords

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 12 , Issue 1 , October 2000 , pp. 31 - 36
Copyright
© EDP Sciences, 2000

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