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PANI/ZnO/Quartz structure for Love wave gas sensor

Published online by Cambridge University Press:  22 April 2009

F. Moreira ,
F. Sarry ,
D. Nicolas-Debarnot ,
O. Elmazria  and
F. Poncin-Epaillard
F. Moreira
Affiliation:
IJL/P2M, Nancy University, Vandœuvre-lès-Nancy, France
F. Sarry*
Affiliation:
IJL/P2M, Nancy University, Vandœuvre-lès-Nancy, France
D. Nicolas-Debarnot
Affiliation:
LPCI, Université du Maine, Le Mans, France
O. Elmazria
Affiliation:
IJL/P2M, Nancy University, Vandœuvre-lès-Nancy, France
F. Poncin-Epaillard
Affiliation:
LPCI, Université du Maine, Le Mans, France
*
frederic.sarry@lpmi.uhp-nancy.fr
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Abstract

Everyone knows the importance of sensors in our society and the huge attempt to improve their properties in order to obtain better sensitivity and selectivity. In this paper, we are more particularly focused on gas sensors based on surface acoustic waves (SAW) device. In a previous work, we have developed and studied a structure composed of a 90° rotated ST quartz crystal covered with a ZnO layer. By developing inter-digital transducers (IDT) on this structure, we can generate different types of acoustic waves. Love waves which are confined near the surface are known to be very sensitives to fluids (liquids or gases). The aim of this work is to present the way we have developed this optimal structure and to test it with a specific polymer. This polymer is polyaniline (PANI). Its main advantage is that it should be deposited by cold pulsed plasma process.

Keywords

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 47 , Issue 1: 4th Colloquium Interdisciplinary in Instrumentation (C2I 2007) , July 2009 , 12702
Copyright
© EDP Sciences, 2009

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