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Backscattering of electrons from selected oxides:MgO, SiO2, and Al2O3

Published online by Cambridge University Press:  15 February 1999

M. Dapor
Affiliation:
Advanced Materials Division, ITC and INFM, 38050 Povo, Trento, Italy
A. Miotello
Affiliation:
INFM and Physics Department, Trento University, 38050 Povo, Trento, Italy
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Abstract

The inelastic and elastic cross-sections of an interacting electron beam with MgO, SiO2, and Al2O3 have been calculated and tabulations are provided for primary electron energies lower than 10 keV.By using the tabulated cross-sections, a Monte-Carlo simulation isutilized to obtain the backscattering coefficient in the energyrange 1–10 keV

Keywords

Type
Research Article
Copyright
© EDP Sciences, 1999

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