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X-Ray Diffraction Determination of the Effect of Passivations on Stress in Patterned Lines of Tungsten

Published online by Cambridge University Press:  22 February 2011

L. Maniguet ,
M. Ignat ,
M. Dupeux ,
J.J. Bacmann  and
Ph. Normandon
L. Maniguet
Affiliation:
Laboratoire de Thermodynarnique et Physico-Chimie M6tallurgiques, (URA 29), ENSEEG, BP75, 38402 St Martin d'Héres -, France
M. Ignat
Affiliation:
Laboratoire de Thermodynarnique et Physico-Chimie M6tallurgiques, (URA 29), ENSEEG, BP75, 38402 St Martin d'Héres -, France
M. Dupeux
Affiliation:
Laboratoire de Thermodynarnique et Physico-Chimie M6tallurgiques, (URA 29), ENSEEG, BP75, 38402 St Martin d'Héres -, France
J.J. Bacmann
Affiliation:
CEA/CEREM/DEM/SGSA, CENG, 17 rue des Martyrs, 38054 Grenoble cedex 9 -, France
Ph. Normandon
Affiliation:
FRANCE TELECOM - CNET, BP.98, 38243 Meylan -, France
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Abstract

The determination by X-ray diffraction of the elastic strain tensors and the corresponding stress tensors in patterned lines of tungsten has been performed to investigate the effect of various passivation. For unpassivated lines, the stresses are biaxial and decrease with decreasing line width. Passivation over patterned lines results in triaxial tensile stress. The stress along the line is not changed by the passivation. The stress across the line decreases as the line width decreases. The third component of stress, perpendicular to the surface, which appears with the passivation, increases with decreasing line width. High compressive intrinsic stress in the passivation does not result in high tensile stress in the metal line.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 338: Symposium – Materials Reliability in Microelectronics IV , 1994 , 241
Copyright
Copyright © Materials Research Society 1994

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References

REFERENCES

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