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Templated Formation of Ordered Metallic Nano-Particle Arrays

Published online by Cambridge University Press:  21 March 2011

Amanda L. Giermann
Affiliation:
Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts, 02139, U.S.A.
Carl V. Thompson
Affiliation:
Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts, 02139, U.S.A.
Henry I. Smith
Affiliation:
Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, Massachusetts, 02139, U.S.A.
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Abstract

We have used interference lithography to create surfaces with di-periodic topography with periods less than 400 nm and formed gold particle arrays on these substrates through the dewetting of thin solid films. Under appropriate conditions, we have found that dewetting of gold films on di-periodic arrays of {111} bound pits in silicon leads to periodic square arrays of particles with very narrow size distributions. In addition, we find that topography can significantly reduce the diameter of particles formed by the dewetting process. We present a mechanism for this self-organization process based on modulation of the local curvature of a conformal film on topography.

Type
Research Article
Copyright
Copyright © Materials Research Society 2004

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