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Synthetic Strategies for MOCVD Precursors for HTcS Thin Films

Published online by Cambridge University Press:  15 February 2011

Harry A. Meinema ,
Klaas Timmer ,
Hans L. Linden  and
Carel I. M. A. Spee
Harry A. Meinema
Affiliation:
TNO-Institute of Applied Physics, Department of Inorganic Materials Chemistry, P.O. Box 595, 5600 AN Eindhoven, The Netherlands
Klaas Timmer
Affiliation:
TNO-Institute of Applied Physics, Department of Inorganic Materials Chemistry, P.O. Box 595, 5600 AN Eindhoven, The Netherlands
Hans L. Linden
Affiliation:
TNO-Institute of Applied Physics, Department of Inorganic Materials Chemistry, P.O. Box 595, 5600 AN Eindhoven, The Netherlands
Carel I. M. A. Spee
Affiliation:
TNO-Institute of Applied Physics, Department of Inorganic Materials Chemistry, P.O. Box 595, 5600 AN Eindhoven, The Netherlands
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Abstract

In recent years much attention has been given world-wide to the development of suitable MOCVD precursors for the deposition of HTcS thin films. Synthetic research has been and is concentrated on the development of superior Ba-, Sr-, Ca- and Y-precursors. Most emphasis is given to the synthesis of thermally stable volatile barium compounds. Synthetic strategies are based on encapsulating the central metal atom, by use of multidentate ligand systems and/or bulky substituents. Most attention is given to the development of thermally stable volatile ß-diketonate complexes, fluorine-free and fluorine-substituted, with auxiliary ligands. Thermally stable monomeric complexes of fluorine-substituted ß-diketonates with polyethers are by far the most volatile Ba-, Sr-, and Ca-precursors presently available. Low melting Y(thd)3.L complexes where L is 4-Et- or 4-t-Bupyridine- N-oxide can be used as liquid yttrium MOCVD precursors at temperatures above 100°C. This paper gives a survey of the trends in recent research activity and developments in these areas.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 335: Symposium Y – Metal-Organic Chemical Vapor Deposition of Electronic Ceramics , 1993 , 193
Copyright
Copyright © Materials Research Society 1994

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