Skip to main content Accessibility help
×
Home

Surface Oxidation Study of Silicon-Doped GaAs Wafers by Ftir Spectroscopy

  • R.-H. Chang (a1), M. Al-Sheikhly (a1), A. Christou (a1) and C. Varmazis (a2)

Abstract

A surface study of Si-doped GaAs (100) oriented wafers treated with NH4OH and HC1 following exposure to fluorine containing plasma was conducted using fourier transform infrared spectroscopy (FTIR). These treatments were observed to produce various oxidation products, such as AS2O5 and GaO. Though inorganic salts, such as (NH4)3GaF6, can be formed on the Si-doped GaAs wafers during cleaning with hydrofluoric acid buffered with ammonium fluoride, the applied cleaning method which consisted of NH4OH and HCl treatments subsequent to exposure to fluorine containing plasma did not induce formation of any inorganic salts. A small amount of hydroxide group was also presented in the samples. Water molecules and ammonium hydroxide can be sources of OH which can then be incorporated interstitially into the wafer surfaces.

Copyright

References

Hide All
1 Kern, W., in Handbook of semiconductor Wafer Cleaning Technology, edited by Kern, W., Noyes Publications, pp. 19 (1993)
2 Hsu, E., Parks, H. G., Craigin, R., Tomaoka, S., Ramberg, L. S., and Lowry, R. K., in Proceedings of the Second International Symposium on Cleaning Technology in Semiconductor Device Manufacturing, edited by Ruzyllo, J., and Novak, R., The Electrochem. Soc, Pennington, N. J., pp. 170 (1992)
3 A. vom Felde, Kern, K., Higashi, G. S., Chabal, Y. J., Christman, S. B., Bahr, C. C., and Cardillo, M. J., Physical Review B , Vol. 42, No. 8, pp. 5240 (1990)
4 Anthony, B., Breaux, L., Hsu, T., Banerjee, S., and Tasch, A., J. Vacuum Science and Technology, Vol. B7, pp. 621 (1989)
5 Schneider, T. P., Cho, J., Aldrich, D. A., Chen, Y. L., Maher, D., and Nemanich, R. J., in Proceedings of the Second International Symposium on Cleaning Technology in Semiconductor Device Manufacturing, edited by Ruzyllo, J., and Novak, R., The Electrochem. Soc, Pennington, N. J., pp. 170 (1992)
6 Rudder, R. A., Fountain, G. G., and Markunas, R. J., J. Appl. Phys., Vol. 60, pp. 3519 (1986)
7 Feng, Z. C., Perkowitz, S., Chen, J., Bajaj, K. K., Kinell, D. K., and Whitney, R. L., in Semiconductor Characterization Present Status and Future Needs, edited by Bullis, W. M., Seiler, D. G., and Diebold, A. C., AIP, New York, pp. 644 (1996)
8 Bentley, F. F., Smithson, L. D., and Rozek, A. L., Infrared Spectra and Characteristic Frequencies ~700-300 cm-1 , Interscience Publishers, New York, pp. 95, 1498 (1968)
9 Herzberg, G., Molecular Spectra and Molecular Structure. I. Spectra of Diatomic Molecules. Van Nostrand Reinhold, New York (1950)
10 Blakemore, J. S., in Key Papers in Physics. GaAs. edited by Blakemore, J.S., AIP, New York, pp. 3 (1987)
11 Lenczycki, C. T. and Burrows, V. A., Thin Solid, Films, Vol. 193/194 pp. 610 (1990)
12 McDevitt, N. T. and Baum, W. L., Spectrochimica Acta, Vol. 20, pp. 799 (1964)
13 Miller, F. A., Carlson, G. L., Bentley, F. F., and Jones, W. H., Spectrochimica Acta, Vol. 16, pp. 195(1960)
14 Thurmond, C. D., Schwartze, G. P., Kammlott, G. W., and Schwartz, B., J. Electrochem. Soc, Vol. 127, pp. 1366 (1980)
15 Schneider, J., Dischler, B., Seelewind, H., Mooney, P. M., Lagowski, J., Matsui, M., Beard, D. R., and Newman, R. C., Appl. Phys. Lett., Vol. 54, pp. 1442 (1989)
16 Bovey, L. F. H., J. Opt. Soc. Am., Vol. 41, pp. 836 (1951)
17 Nakamoto, K., Infrared and Raman Spectra of Inorganic and Coordinating Compounds. Wiley. New York, pp. 132 (1978)
18 Hamann, S. D., Aust. J. Chem., Vol 31, pp. 11 (1978)
19 Plumb, R. C. and Horning, D. F., J. Chem. Phys., Vol. 23, pp. 947 (1955)
20 Herzberg, G., Infrared and Raman Spectra of Polyatomic Molecules, Van Nostrand Reinhold, New York, pp. 167 (1945)
21 Burrows, V. A. and Yota, J., Thin Solid Films, Vol. 193/194, pp. 371 (1990)

Surface Oxidation Study of Silicon-Doped GaAs Wafers by Ftir Spectroscopy

  • R.-H. Chang (a1), M. Al-Sheikhly (a1), A. Christou (a1) and C. Varmazis (a2)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed