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Statistical Texture Analysis of Microscopy Images for the Purpose of Surface Characterization

  • Thomas E Sadowski (a1), Christine Caragianis Broadbridge (a2) and John DaPonte (a3)

Abstract

This study focuses on the application of an image processing technique known as texture analysis to provide a complementary method to process non-contact atomic force microscopy data. For the current study, SrBi2Ta9O9 (SBT) thin films (∼200nm) on silicon samples were prepared via MOD and imaged via nc-AFM. Previous studies have qualitatively chosen grain size or grain density to quantify the surface characteristics of SBT but for this study texture analysis was used. Results obtained from the texture analysis and the subsequent stepwise discriminant analysis illustrated the importance of grain density and its effect on the statistics obtained from the gray scale cooccurrence matrix.

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[1] Pechkis, D.L., “The Microstructural Characterization of Thin Film Ferroelectrics for Electronic Applications.” Southern Connecticut State University Honors Thesis, 2001
[2] Haralick, R.M. et al. , IEEE Trans. Sys., Man, and Cyb., 67, 786, 1979
[3] Han, J.P, “Ferroelectric SrBi2Ta9O9 (SBT) and Metal/Ferroelectric/Insulator/Si Transistor for Memory Applications.” Yale University Technical Report, 2002.
[4] Ma, T.P., IEEE Trans. Electron Devices, 45, 680 (invited paper), 1998.
[5] Liu, X., Caragianis-Broadbridge, C., Lehman, A.H., McGuinness, J., and Ma, T.P., Ferroelectric Thin Films XII (Mater. Res. Soc. Symp. Proc. 2004), 784

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