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A short review and Present Status of ZnO Nanoparticle Formation by Ion Implantation Combined with Thermal Oxidation

  • Hiroshi Amekura (a1), Oleg A Plaksin (a2), Naoki Umeda (a3), Yoshihiko Takeda (a4), Naoki Kishimoto (a5) and Christoph Buchal (a6)...

Abstract

Recently many groups have started studies of formation of zinc-oxide (ZnO) nanoparticle (NP) in transparent insulators, such as silica glass, sapphire, etc, using ion implantation techniques. In the early half of this article, we shortly review recent activities of ZnO NP formation using ion implantation combined with thermal oxidation. Some groups succeeded but the others did not. Even if they succeeded in the formation of ZnO nanostructures, one reported that they were in the shape of thin film and another reported the NP form. Based on our recent experimental results, we point out the importance of the oxidation temperature and the peculiar shapes and depth profiles of ZnO formed.

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Keywords

A short review and Present Status of ZnO Nanoparticle Formation by Ion Implantation Combined with Thermal Oxidation

  • Hiroshi Amekura (a1), Oleg A Plaksin (a2), Naoki Umeda (a3), Yoshihiko Takeda (a4), Naoki Kishimoto (a5) and Christoph Buchal (a6)...

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