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Self-Formed Aluminum Nitride Microtubes that Exhibit a Large Bending Stress

Published online by Cambridge University Press:  21 March 2011

Morito Akiyama ,
Kazuhisa Shobu ,
Chao-Nan Xu  and
Kazuhiro Nonaka
Morito Akiyama
Affiliation:
Institute for Structural and Engineering Materials, National Institute of Advanced Industrial Science and Technology, 807-1 Shuku, Tosu, Saga 841-0052 Japan
Kazuhisa Shobu
Affiliation:
Institute for Structural and Engineering Materials, National Institute of Advanced Industrial Science and Technology, 807-1 Shuku, Tosu, Saga 841-0052 Japan
Chao-Nan Xu
Affiliation:
Institute for Structural and Engineering Materials, National Institute of Advanced Industrial Science and Technology, 807-1 Shuku, Tosu, Saga 841-0052 Japan
Kazuhiro Nonaka
Affiliation:
Institute for Structural and Engineering Materials, National Institute of Advanced Industrial Science and Technology, 807-1 Shuku, Tosu, Saga 841-0052 Japan
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Abstract

We have investigated the aluminum nitride microtubes made of aluminum nitride thin film. Aluminum nitride thin film deposited on aluminum foil forms microtubes of itself at room temperature when the aluminum foil is dissolved in hydrochloric acid solution. The aluminum nitride microtubes exhibit a large bending stress of 1100 94 megapascals. The bending stress is more than three times larger than the bending strength of aluminum nitride bulk. The diameter of the microtubes is proportional to the film thickness. The bending stress is independent of the film thickness and is fixed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 695: Symposium L – Thin Films: Stresses and Mechanical Properties IX , 2001 , L3.23.1
Copyright
Copyright © Materials Research Society 2002

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References

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