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Properties of Surface Acoustic Waves in AlN And GaN

Published online by Cambridge University Press:  11 February 2011

Jianyu Deng ,
Daumantas Ciplys ,
Gang Bu ,
Michael Shur  and
Remis Gaska
Jianyu Deng
Affiliation:
Sensor Electronic Technology, Inc., 1195 Atlas Road, Columbia, SC 29209, U.S.A.
Daumantas Ciplys
Affiliation:
Department of Radiophysics, Vilnius University, Vilnius 2040, Lithuania Department of Electrical, Computer, and Systems Engineering and Center for Integrated Elelectronics, Rensselaer Polytechnic Institute, Troy, NY 12180, U.S.A.
Gang Bu
Affiliation:
Department of Electrical, Computer, and Systems Engineering and Center for Integrated Elelectronics, Rensselaer Polytechnic Institute, Troy, NY 12180, U.S.A.
Michael Shur
Affiliation:
Department of Electrical, Computer, and Systems Engineering and Center for Integrated Elelectronics, Rensselaer Polytechnic Institute, Troy, NY 12180, U.S.A.
Remis Gaska
Affiliation:
Sensor Electronic Technology, Inc., 1195 Atlas Road, Columbia, SC 29209, U.S.A.
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Abstract

The surface acoustic wave velocities, electromechanical coupling coefficients, and the spatial distributions of both elastic displacement and electric potential have been calculated for various configurations of gallium nitride and aluminum nitride. The electromechanical coupling coefficient values of 0.13 % in GaN and 0.29 % in AlN have been predicted. The maximum electromechanical coupling coefficient values of 0.24 % at Euler angles (0, 54°, 90°) in GaN and 1.08 % at (0, 53°, 90°) in AlN have been found. For GaN layer-on- sapphire substrate structures, the SAW velocity and electromechanical coupling coefficient have been calculated as functions of layer thickness and acoustic wavelength. The experimentally measured values of the surface acoustic wave velocity and electromechanical coupling coefficient are in satisfactory agreement with the calculation results.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 743: Symposium L – GaN and Related Alloys , 2002 , L6.36
Copyright
Copyright © Materials Research Society 2003

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References

REFERENCES

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