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Precise and Smooth Removal from Polymer Surfaces by VUV Excimer Laser Ablation at 157 nm: PMMA.

  • G. Padeletti (a1), M. Lapczyna (a2) and M. Stuke (a2)

Abstract

Smooth polymer surfaces can be generated by VUV laser ablation at 157 nm. This has been demonstrated for poly-methyl-metacrylate (PMMA) by atomic force microscopy (AFM) analysis of laser-exposed surfaces. At excimer laser fluences below 30 mJ/cm2 the mean roughness (Ra) remains below 10 nm for both single and 10 shot exposures.

A detailed characterization of the surface nano-morphology distribution carried out by the “power spectral density” (PSD) analysis, shows that the surface is smoothened by the VUV laser for lateral scales smaller than 20 μm.

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1. Lapczyna, M., Stuke, M., Appl.Phys. A66, 473, (1998)
2. Lapczyna, M., Ph.D. Thesis (1998), University of Kassel, Germany
3. Lapczyna, M., Stuke, M., Applied Physics A, (1999)
4. Binning, G., Quate, C. F. and Gerber, C., Phys. Rev. Lett., 56, 930, (1997)
5. Padeletti, G., Larciprete, R., J. Vac. Sci. Techn. B16, 1762, (1998).
6. Bhushan, B., in Tribology and Mechanism of Magnetic Storage Devices (Springer, NewYork,1998)
7. Russ, J. C., in Computer Assisted Microscopy the Measurements and Analysis of Images (Plenum, New York, 1993)

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Precise and Smooth Removal from Polymer Surfaces by VUV Excimer Laser Ablation at 157 nm: PMMA.

  • G. Padeletti (a1), M. Lapczyna (a2) and M. Stuke (a2)

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