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Physical and Electro-Optical Properties of Ion Beam Sputtered Thin Film PLZT Ceramic

Published online by Cambridge University Press:  16 February 2011

L.L. Boyer ,
A.Y. Wu  and
J.R. Mcneil
L.L. Boyer
Affiliation:
University of New Mexico, Center for High Technology Materials, Albuquerque, New Mexico 87131
A.Y. Wu
Affiliation:
University of New Mexico, Center for High Technology Materials, Albuquerque, New Mexico 87131
J.R. Mcneil
Affiliation:
University of New Mexico, Center for High Technology Materials, Albuquerque, New Mexico 87131
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Abstract

High quality PLZT thin films have been deposited using ion beam sputtering. The deposited material has perovskite crystal structure tetragonal in phase with the c-axis predominantly normal to the surface. Material deposited at temperatures below 450°C has pyrochlore structure while that deposited above 650°C displays polycrystalline characteristics. The deposition rate was approximately 0.2–0.5 Å/sec yielding film thicknesses of ∼4500 Å. The surface morphology of the deposited films is of high quality with a RMS roughness 60% that of magnetron sputtered films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 200: Symposium Y – Ferroelectric Thin Films I , 1990 , 97
Copyright
Copyright © Materials Research Society 1990

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References

REFERENCES

1. Boyer, L.L., Wu, A.Y., and McNeil, J.R., J. Vacuum Science and Technology A 7. 1199–1201 (1989).Google Scholar
2. Haertling, G.H., J. American Ceramic Society 54 303–09 (1971).Google Scholar
3. Adachi, H., Mitsuyu, T., Yamazaki, O., and Wasa, K., Japn J. Appl. Phys. 24, suppl. 24–3, 13 (1985).Google Scholar
4. Yariv, A., Optical Electronics, 3rd ed. (CBS College Publishing, New York, 1985), pg. 238–245.Google Scholar
5. Mukherjee, A and Myers, R.A. (private communication).Google Scholar