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Microwave Measurements of Ferroelectric Thin Films: Techniques, Error and Limitations

Published online by Cambridge University Press:  01 February 2011

Peter Kr. Petrov
Peter Kr. Petrov*
Affiliation:
Centre for Physical Electronics and Materials, FESBE, London South Bank University, London, SE1 0AA, UK.
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Abstract

This paper examines the problem of evaluating the microwave properties of thin ferroelectric films patterned as planar capacitors. Two types of microwave measurements of ferroelectric thin films are considered: reflection and resonance type measurements. Algorithms are presented for evaluation of capacitance-permittivity and dielectric loss. Using sensitivity analysis, the error and limitations associated with these measurements are estimated. The end result is a series of formulae that use the network analyser's measurement data to calculate the capacitance-permittivity, the dielectric loss, and the associated error.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 784: Symposium C – Ferroelectric Thin Films XII , 2003 , C5.5
Copyright
Copyright © Materials Research Society 2004

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References

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