Hostname: page-component-848d4c4894-8bljj Total loading time: 0 Render date: 2024-06-20T03:02:43.388Z Has data issue: false hasContentIssue false
  • English
  • Français

Microwave Measurements of Ferroelectric Thin Films: Techniques, Error and Limitations

Published online by Cambridge University Press:  01 February 2011

Peter Kr. Petrov
Peter Kr. Petrov*
Affiliation:
Centre for Physical Electronics and Materials, FESBE, London South Bank University, London, SE1 0AA, UK.
Get access

Abstract

This paper examines the problem of evaluating the microwave properties of thin ferroelectric films patterned as planar capacitors. Two types of microwave measurements of ferroelectric thin films are considered: reflection and resonance type measurements. Algorithms are presented for evaluation of capacitance-permittivity and dielectric loss. Using sensitivity analysis, the error and limitations associated with these measurements are estimated. The end result is a series of formulae that use the network analyser's measurement data to calculate the capacitance-permittivity, the dielectric loss, and the associated error.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 784: Symposium C – Ferroelectric Thin Films XII , 2003 , C5.5
Copyright
Copyright © Materials Research Society 2004

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Lancaster, M.J., Powell, J. and Porch, A., Supercond Sci Technol., 11, 1323 (1998).Google Scholar
2. Petrov, P.K. and Alford, N. McN., Electron. Lett., 37, 1066 (2001).Google Scholar
3. Kingon, A.I., Streiffer, S.K., Basceri, C. and Summerfelt, S.R., Mater. Res. Bull. 21, 46 (1996).Google Scholar
4. Kozyrev, A.B., Keis, V.N., Koepf, G., Yandrovfski, R, Soldatenkov, O.I., Dudin, K.A., and Dovgan, D.P., Microelectron. Eng., 29, 257, (1995).Google Scholar
5. Vendik, O.G., Zubko, S.P., Nikol'ski, M.A., Tech. Phys. 44, 349 (1999).Google Scholar