Skip to main content Accessibility help
×
Home

Microwave Measurements of Ferroelectric Thin Films: Techniques, Error and Limitations

  • Peter Kr. Petrov (a1)

Abstract

This paper examines the problem of evaluating the microwave properties of thin ferroelectric films patterned as planar capacitors. Two types of microwave measurements of ferroelectric thin films are considered: reflection and resonance type measurements. Algorithms are presented for evaluation of capacitance-permittivity and dielectric loss. Using sensitivity analysis, the error and limitations associated with these measurements are estimated. The end result is a series of formulae that use the network analyser's measurement data to calculate the capacitance-permittivity, the dielectric loss, and the associated error.

Copyright

References

Hide All
1. Lancaster, M.J., Powell, J. and Porch, A., Supercond Sci Technol., 11, 1323 (1998).
2. Petrov, P.K. and Alford, N. McN., Electron. Lett., 37, 1066 (2001).
3. Kingon, A.I., Streiffer, S.K., Basceri, C. and Summerfelt, S.R., Mater. Res. Bull. 21, 46 (1996).
4. Kozyrev, A.B., Keis, V.N., Koepf, G., Yandrovfski, R, Soldatenkov, O.I., Dudin, K.A., and Dovgan, D.P., Microelectron. Eng., 29, 257, (1995).
5. Vendik, O.G., Zubko, S.P., Nikol'ski, M.A., Tech. Phys. 44, 349 (1999).

Related content

Powered by UNSILO

Microwave Measurements of Ferroelectric Thin Films: Techniques, Error and Limitations

  • Peter Kr. Petrov (a1)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed.