Skip to main content Accessibility help
×
Home

Microelectrochemical Characterization and Modification of Semiconductor Surfaces with Polycrystalline Ti/TiO2 as an Example

  • A. Michaelis (a1), S. Kudelka (a1) and J. W. Schultze (a1)

Abstract

Different new micro-methods such as anisotropy micro-ellipsometry (AME), photoresist micro-electrochemistry, micro-photocurrent spectroscopy, and UV-laser scanning were performed simultaneously to characterize and modify heterogeneous semiconducter surfaces. All measurements were carried out on single grains with the Ti/TiO2 system as an example. The crystallographic orientations of the substrate grains were determined in-situ by AME. It is shown that both the electronic and the optical properties of the semiconducting TiO2 films sensitively depend on the substrate texture. Film properties such as layer thickness and defect state concentration vary with the substrate orientation in a systematic manner.

The TiO2 films were modified at high local resolution by means of focused UV-laser illumination. Both a thickening (writing) or thinning (erasing) of the films could be realized depending on the potential applied during the illumination. Therefore, the anodic potential could be used to control the layer thickness and to generate semiconducting structures with thickness gradients.

Copyright

References

Hide All
1. Arsov, Lj. D.: Electrochim. Acta, 30 (1985) 1645
2. Michaelis, A., Schuitze, J.W.: Thin Solid Films 233 (1993) 86
3. Michaelis, A., Schuitze, J.W.: Thin Solid Films 274 (1996) 82
4. Kudelka, St., Michaelis, A., Schuitze, J.W.: Electrochim. Acta, 40 (1995)
5. Kudelka, St., Michaelis, A.; Schuitze, J.W.: Ber. Bunsenges. Phys. Chem. 99 (1995) 1020
6. Schuitze, J.W., Bade, K., Michaelis, A.: Ber. Bunsenges. Phys. Chem. 95 (1991) 1349
7. Bade, K., Karstens, O., Michaelis, A., Schuitze, J.W.: Faraday Disc. 94 (1992) 45
8. Michaelis, A., Schuitze, J.W.: Electrochim Acta, accepted for publication
9. Sukamto, J.P.H., Smyrl, W.H., McMillan, C.S., Kozlowski, M.R.: J. Electrochem. Soc. 130 (1992) 265
10. Sukamto, J.P.H., McMillan, C.S., Smyrl, W.H.: Electrochimica Acta 38, (1993) 15
11. Michaelis, A., Schuitze, J.W., Applied Surface Science (1996) in press
12. Quarto, F. Di., Piazza, S., Sunseri, C.: Ber. Bunsenges. Phys. Chem. 91, (1987) 437
13. Quarto, F. Di., Piazza, S., C., Sunseri: J. Chem. Soc. Faraday Trans. I, 85, (1989), 3309
14. Michaelis, A., Delplancke, J.L.; Schuitze, J.W.: Materials Science Forum, 471 (1995) 185

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed