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Laser Induced Forward Transfer

Published online by Cambridge University Press:  26 February 2011

R.J. Baseman ,
A. Gupta ,
R.C. Sausa  and
C. Progler
R.J. Baseman
Affiliation:
IBM T.J. Watson Research Center, Yorktown Heights, NY 10598
A. Gupta
Affiliation:
IBM T.J. Watson Research Center, Yorktown Heights, NY 10598
R.C. Sausa
Affiliation:
IBM T.J. Watson Research Center, Yorktown Heights, NY 10598
C. Progler
Affiliation:
IBM T.J. Watson Research Center, Yorktown Heights, NY 10598
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Abstract

The laser induced forward transfer (LIFT) technique employs a pulsed laser to transfer material, originally precoated as a thin film on a transparent support, from that support onto a selected target substrate. LIFT has been used to deposit a variety of thin films, thick films through the repetitive transfer of thin films, multilayer structures through the transfer of appropriately layered precoated films, and metal silicon alloys.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 101: Symposium B – Laser and Particle-Beam Chemical Processing for Microelectronics , 1987 , 237
Copyright
Copyright © Materials Research Society 1998

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References

REFERENCES

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