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Flat Panel Imagers Based on Excimer Laser Annealed, poly-Si Thin Film Transistor Technology

  • J.P. Lu (a1), K. Van Schuylenbergh (a1), R. T. Fulks (a1), J. Ho (a1), Y. Wang (a1), R. Lau (a1), P. Nylen (a1), P. Mei (a1), M. Mulato (a1), J.B. Boyce (a1) and R.A. Street (a1)...


Pulsed Excimer-Laser Annealing (ELA) has become an important technology to produce high performance, poly-Si Thin Film Transistors (TFTs) for large area electronics. The much-improved performance of these poly-Si TFTs over the conventional hydrogenated amorphous Si TFTs enables the possibility of building next generation flat panel imagers with higher-level integration and better noise performance. Both the on-glass integration of peripheral driver electronics to reduce the cost of interconnection and the integration of a pixel level amplifier to improve the noise performance of large area imagers have been demonstrated and are discussed in this paper.



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