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Experimental Study of Cluster Size Effect with Size-selected Cluster Ion Beam System

  • Noriaki Toyoda (a1), Shingo Houzumi (a1), Takaaki Aoki (a2) and Isao Yamada (a1)

Abstract

A size-selected gas cluster ion beam (GCIB) system has been developed to study the size effects of energetic large cluster ion bombardments on a solid surface for the first time. This system equipped a permanent magnet with a magnetic flux density of 1.2 T. There is a sliding detector and sample holder on a guiding rail perpendicular to the incoming cluster beam axis. By locating a sample at a certain position, particular size of cluster ion can be irradiated continuously with affordable ion current density. When the total acceleration energy of Ar-GCIB was 5keV, both amorphous and oxide thickness on Si substrate increased with decreasing cluster size. This result showed good agreement with that obtained from molecular dynamics simulations.

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[1] Aoki, T., Seki, T., Matsuo, J., Insepov, Z. and Yamada, I., Nucl. Intr. and Meth. B, 153, 264 (1999).
[2] Yamada, I., Matsuo, J., Toyoda, N., Kirkpatrick, A., Mat. Sci. and Eng. R, 34, 231 (2001).
[3] Toyoda, N., Saito, M., Hagiwara, N., Matsuo, J. and Yamada, I., Proceeding of 1998 International Conference on Ion Implantation Technology, p. 1234 (1998).

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Experimental Study of Cluster Size Effect with Size-selected Cluster Ion Beam System

  • Noriaki Toyoda (a1), Shingo Houzumi (a1), Takaaki Aoki (a2) and Isao Yamada (a1)

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