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Experimental Study of Cluster Size Effect with Size-selected Cluster Ion Beam System

Published online by Cambridge University Press:  01 February 2011

Noriaki Toyoda ,
Shingo Houzumi ,
Takaaki Aoki  and
Isao Yamada
Noriaki Toyoda
Affiliation:
Laboratory of Advanced Science and Technology for Industry, Himeji Institute of Technology, 3–1–2 Kouto, Kamigori, Hyogo, 678–1205, JAPAN
Shingo Houzumi
Affiliation:
Laboratory of Advanced Science and Technology for Industry, Himeji Institute of Technology, 3–1–2 Kouto, Kamigori, Hyogo, 678–1205, JAPAN
Takaaki Aoki
Affiliation:
Quantum Science and Engineering Center, Kyoto University, Sakyo, Kyoto, 606–8501, JAPAN
Isao Yamada
Affiliation:
Laboratory of Advanced Science and Technology for Industry, Himeji Institute of Technology, 3–1–2 Kouto, Kamigori, Hyogo, 678–1205, JAPAN
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Abstract

A size-selected gas cluster ion beam (GCIB) system has been developed to study the size effects of energetic large cluster ion bombardments on a solid surface for the first time. This system equipped a permanent magnet with a magnetic flux density of 1.2 T. There is a sliding detector and sample holder on a guiding rail perpendicular to the incoming cluster beam axis. By locating a sample at a certain position, particular size of cluster ion can be irradiated continuously with affordable ion current density. When the total acceleration energy of Ar-GCIB was 5keV, both amorphous and oxide thickness on Si substrate increased with decreasing cluster size. This result showed good agreement with that obtained from molecular dynamics simulations.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 792: Symposium R – Radiation Effects and Ion Beam Processing of Materials , 2003 , R10.8
Copyright
Copyright © Materials Research Society 2004

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References

REFERENCES

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