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Published online by Cambridge University Press: 10 February 2011
We have fabricated erbium- and oxygen-doped Si/SiGe waveguide diodes showing the characteristic 1.54 µm electroluminescence (EL) from incorporated Er+3, ions. All samples were grown by molecular beam epitaxy (MBE). The EL from the polished end facet of the waveguide was measured with a confocal microscope revealing a spatially narrow emission. Additional annealing was not necessary to improve the luminescence characteristics. Only a weak temperature dependence is found for the EL intensity between 4K and room temperature.