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Enhancement of Field Emission Current from ZnO Nanorods Fabricated by Two Step Chemical Vapor Deposition with Laser Ablation of ZnO

  • Takashi Hirate (a1), Takashi Kimpara (a2), Kazumoto Takizawa (a3) and Tomomasa Satoh (a4)

Abstract

We fabricated well-aligned ZnO nanorods with thin diameter by two-step chemical vapor deposition method combined with laser ablation of a sinterd ZnO target. Firstly, well-aligned ZnO nanorods with thick diameter of about 110 nm are grown on an n-Si (111) wafer. Next, a thin ZnO nanorod with about 30 nm diameter is grown on the center of the flat tip of each well-aligned and thick ZnO nanorod by controlling a flow rate of oxygen. Although thick ZnO nanorods do not emit a recognizable field emission current, thin ZnO nanorods with 1500 nm length show a field emission current of 500 μA under an electric field of 31 V/μm.

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Enhancement of Field Emission Current from ZnO Nanorods Fabricated by Two Step Chemical Vapor Deposition with Laser Ablation of ZnO

  • Takashi Hirate (a1), Takashi Kimpara (a2), Kazumoto Takizawa (a3) and Tomomasa Satoh (a4)

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