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Electron Beam Processing for Spin-on Polymers and its Applications to Back-End-of-Line (BEOL) Integration

  • J. J. Yang (a1), J. Gill (a1), J. Kennedy (a1), S.-Q. Wang (a1), L. Forester (a1) and M. Ross (a2)...

Abstract

The versatility of e-beam processing provides the capability of tailoring the properties of spin-on polymers. Using different e-beam processing schemes, one can obtain a variety of films such as a homogeneous film with modified properties from the original, a film with variable properties as a function of depth, or a film having two distinct layers. In this paper, we demonstrated how to utilize this advantage of e-beam process to facilitate integration of spin-on polymers in the back-end-of-line manufacturing.

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