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Computational Investigation of Selective Movpe of AlXGa1-XAs in Presence of Hcl

  • Maria Nemirovskaya (a1), Carlo Cavallotti (a1) and Klavs Jensen (a1)

Abstract

The deposition of AlGaAs in the presence of HCl was investigated at the macroscopic and mesoscopic scales. Fluid dynamics simulations were first performed in order to study the dependence of the deposition rate on the operating conditions. Unknown gas phase and surface kinetic parameters were estimated by quantum chemistry and transition state computations. The fluxes of all species to the surface were thus computed and provided the input to a kinetic Monte Carlo model used to investigate the morphology evolution of the film.

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References

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1. Gaussian 98, Frisch, M.J.et al. Gaussian, Inc., Pittsburgh PA, 1998.
2. Adamson, S. D., Han, B. K., Hicks, R. F., Appl. Phys. Lett., 69, 3236 (1996)
3. Creighton, J. R., Appl. Surf. Sci. 82–3, 171 (1994)
4. Shimoyama, K., Inoue, Y., Fujii, K. and Gotoh, H., J. Cryst. Growth 124, 235 (1992)
5. Dorshchand, S., Daweritz, L. and Berger, H., Crystal Res. & Technol. 18, 1359 (1983)
6. Vvedensky, D. D., Itoh, M., Bell, G. R., Jones, T. S., and Joyce, B. A., J. Cryst. Growth 201/202, 56 (1999)
7. Grosse, F. and Zimmermann, R., J. Cryst. Growth 212, 128 (2000)
8. Venkataramani, R., Multiscale Models of MOVPE Processes, Ph.D. Thesis, MIT, 2000
9. Kasu, M. and Kobayashi, N., J. Cryst. Growth 174, 513 (1997)
10. Taguchi, , Shiraishi, K., and Ito, T., Phys. Rev. B 60, 11509 (1999)

Computational Investigation of Selective Movpe of AlXGa1-XAs in Presence of Hcl

  • Maria Nemirovskaya (a1), Carlo Cavallotti (a1) and Klavs Jensen (a1)

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