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Amorphous and Microcrystalline Silicon Based Solar Cells and Modules on Textured Zinc Oxide Coated Glass Substrates

  • Bernd Rech (a1), Joachim Müller (a1), Tobias Repmann (a1), Oliver Kluth (a1), Tobias Roschek (a1), Jürgen Hüpkes (a1), Helmut Stiebig (a1) and Wolfgang Appenzeller (a1)...

Abstract

This paper addresses scientific and technological efforts to develop highly efficient silicon thin film solar modules on glass substrates. We present a comprehensive study of μc-Si:H p-i-n single junction and a-Si:H/μc-Si:H stacked solar cells prepared by plasma-enhanced chemical vapour deposition (PECVD) at 13.56 MHz excitation frequency. In the first step cell development was performed in a small area PECVD reactor showing the relationship between deposition process and resulting solar cell performance. Subsequent up-scaling to a substrate area of 30×30 cm2 confirmed the scalability to large area reactors. Moreover, we developed textured ZnO:Al films by sputtering and post deposition wet chemical etching as front contact TCO-material with excellent light scattering properties. A-Si:H/μc-Si:H tandem cells developed on this textured ZnO yielded stable efficiencies up to 11.2 % for a cell area of 1 cm2. First solar modules were prepared in our recently installed process technology, which includes PECVD, sputtering, texture etching and laser scribing on substrate sizes up to 30x30 cm2. Initial module efficiencies of 10.8 % and 10.1 % were achieved for aperture areas of 64 cm2 and 676 cm2, respectively.

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1. Meier, J., Vallat-Sauvain, E., Dubail, S., Kroll, U., Dubail, J., Golay, S., Feitknecht, L., Torres, P., Faÿ, S., Fischer, D., Shah, A., Sol. Energy Mater. Sol. Cells 66, 73 (2001), and references therein.
2. Saito, K., Sano, M., Matuda, K., Kondo, T., Nishimoto, T., Ogawa, K., Kajita, I., Proc. 2nd World Conference PVSEC, Vienna, Austria, 1998, p. 351.
3. Vetterl, O., Finger, F., Carius, R., Hapke, P., Houben, L., Kluth, O., Lambertz, A., Mück, A., Rech, B., Wagner, H., Sol. Energy Mater. Sol. Cells 62, 97 (2000).
4. Rech, B., Kluth, O., Repmann, T., Roschek, T., Springer, J., Müller, J., Finger, F., Stiebig, H. and Wagner, H., Sol. Energy Mater. Sol. Cells 74, 439 (2002).
5. Yamamoto, K., Yoshimi, M., Tawada, Y., Fukuda, S., Sawada, T., Meguro, T., Takata, H., Suezaki, T., Koi, Y., Hayashi, K., Suzuki, T., Ichikawa, M., Nakajima, A., Sol. Energy Mater. Sol. Cells 74, 449 (2002).
6. Hüpkes, J., Rech, B., Kluth, O., Müller, J., Siekmann, H., Agashe, C., Bochem, H.P., Wuttig, M., this conference.
7. Löffl, A., Wieder, S., Rech, B., Kluth, O., Beneking, C., Wagner, H., Proc. 14h EC-PVSEC, Barcelona (1997), p. 2089
8. Kluth, O., Rech, B., Houben, L., Wieder, S., Schöpe, G., Beneking, C., Wagner, H., Löffl, A., Schock, H.W., Thin Solid Films 351, 247 (1999)
9. Faÿ, S., Dubail, S., Kroll, U., Meier, J., Ziegler, Y., Shah, A., Proc. 16th EC-PVSEC, Glasgow, U.K. (2000), p.362.
10. Groenen, R., Löffler, J., Sommeling, P. M., Linden, J. L., Hamers, E. A. G., Schropp, R.E.I. and Sanden, M. C. M. van de, Thin Solid Films 392, 226 (2001).
11. Lechner, P., Geyer, R., Schade, H., Rech, B. and Müller, J., Proc. 28th IEEE Photovoltaic Specialists Conference, Anchorage, USA (2000) p. 861.
12. Carius, R., private communication.
13. Müller, J., Schöpe, G., Kluth, O., Rech, B., Ruske, M., Trube, J., Szyszka, B., Jiang, X. and Bräuer, G., Thin Solid Films 392, 327(2001).
14. Szyszka, B., Thin Solid Films 351, 164 (1999).
15. Guo, L., Kondo, M., Fukawa, M., Saitoh, K., Matsuda, A., Jpn. J. Appl. Phys. 37, L1116 (1998).
16. Rech, B., Roschek, T., Müller, J., Wieder, S., Wagner, H., Solar Energy Materials & Solar Cells 66 (2001) 267273
17. Roschek, T., Repmann, T., Müller, J., Rech, B., Wagner, H., J. Vac. Sci. Technol. A20 (2), 492 (2002)
18 Roschek, T., Repmann, T., Kluth, O., Müller, J., Rech, B., Wagner, H., Mat. Res. Soc. Symp. Proc. 715 (2002) A26.5
19. Rech, B., Roschek, T., Repmann, T., Müller, J., Schmitz, R. and Appenzeller, W., Thin Solid Films 427, 157 (2003).
20. Repmann, T., Appenzeller, W., Roschek, T., Rech, B. and Wagner, H., Proc.28th IEEE Photovoltaic Specialists Conference, Anchorage, USA (2000) p. 912.
21. Klein, S., Finger, F., Carius, R., Dylla, T., Rech, B., Grimm, M., Houben, L. and Stutzmann, M., Thin Solid Films (2003), available online.
22. Repmann, T., Appenzeller, W., Roschek, T., Rech, B., Kluth, O., Müller, J., Psyk, W., Geyer, R., Lechner, P., Proc. 7th European Photovoltaic Solar Energy Conf., edited by McNelis, B., Palz, W., Ossenbrink, H. A., Helm, P. (WIP-Munich and ETA-Florence), Munich, 2001, p. 2836

Amorphous and Microcrystalline Silicon Based Solar Cells and Modules on Textured Zinc Oxide Coated Glass Substrates

  • Bernd Rech (a1), Joachim Müller (a1), Tobias Repmann (a1), Oliver Kluth (a1), Tobias Roschek (a1), Jürgen Hüpkes (a1), Helmut Stiebig (a1) and Wolfgang Appenzeller (a1)...

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