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Texturing and Dielectric Properties of Laser Deposited BaTiO3 Thin Films Grown on Heated Substrates

Published online by Cambridge University Press:  25 February 2011

M.D. Vaudin ,
L.P. Cook ,
W. Wong-Ng ,
P.K. Schenck ,
P.S. Brody ,
B.J. Rod  and
K.W. Bennett
M.D. Vaudin
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899
L.P. Cook
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899
W. Wong-Ng
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899
P.K. Schenck
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899
P.S. Brody
Affiliation:
Harry Diamond Laboratories, Adelphi, MD 20783
B.J. Rod
Affiliation:
Harry Diamond Laboratories, Adelphi, MD 20783
K.W. Bennett
Affiliation:
Harry Diamond Laboratories, Adelphi, MD 20783
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Abstract

Thin films of BaTiO3 were deposited on platinum-coated silicon substrates using pulsed laser deposition and characterized using electron microscopy, powder x-ray diffraction and electrical measurements. The microstructure consisted of columnar BaTiO3 grains oriented normal to the substrate. Two preferred orientations were observed, with either the (001) or (111) planes of BaTiO3 being parallel to the substrate. The electrical properties of two films were measured and it was found that the (111) film was ferroelectric and the (001) film was not. Possible reasons for this are discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 243: Symposium G – Ferroelectric Thin Films II , 1991 , 513
Copyright
Copyright © Materials Research Society 1992

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References

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