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Strong Synergistic Effects between Ceria and Montmorillonite particles in Glass CMP Slurries

Published online by Cambridge University Press:  01 February 2011

Mingming Fang
Affiliation:
Technical Center, Amcol International, Inc., 1350 West Shure Drive, Arlington Heights, IL 60004
Michael Ianiro
Affiliation:
Technical Center, Amcol International, Inc., 1350 West Shure Drive, Arlington Heights, IL 60004
Don Eisenhour
Affiliation:
Technical Center, Amcol International, Inc., 1350 West Shure Drive, Arlington Heights, IL 60004
Jason St. Onge
Affiliation:
Technical Center, Amcol International, Inc., 1350 West Shure Drive, Arlington Heights, IL 60004
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Abstract

Glass substrate has superior shock resistance and higher stiffness for increased rpm and access time than Al/NiP substrate. The main barrier for the use of glass instead of Al/NiP in desktop computers has been the high cost of the glass substrate, which is mostly caused by its need for a long polishing time. Developing a glass CMP slurry that can deliver a higher polishing rate and fewer surface defects is a continuous challenge in the disk industry. We recently discovered that adding montmorillonite particles into a ceria-based glass CMP slurry can significantly increase the polishing rate without sacrificing the surface smoothness. It is the first time, to our knowledge, that this strong synergistic effect between ceria and montmorillonite particles was reported in the glass CMP area. Several physical properties of the ceria- montmorillonite slurries, such as viscosity, zeta potential, and particle size, are characterized in order to understand the mechanism of the synergistic effect.

Type
Research Article
Copyright
Copyright © Materials Research Society 2005

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