Hostname: page-component-586b7cd67f-dlnhk Total loading time: 0 Render date: 2024-12-01T20:50:55.215Z Has data issue: false hasContentIssue false

Recent Results on the Road to a SiGe Quantum Cascade Laser

Published online by Cambridge University Press:  01 February 2011

Alex Borak
Affiliation:
Paul Scherrer Institut, CH-5232 Villigen PSI, Switzerland.
Soichiro Tsujino
Affiliation:
Paul Scherrer Institut, CH-5232 Villigen PSI, Switzerland.
Claudiu Falub
Affiliation:
Paul Scherrer Institut, CH-5232 Villigen PSI, Switzerland.
Maxi Scheinert
Affiliation:
Paul Scherrer Institut, CH-5232 Villigen PSI, Switzerland.
Laurent Diehl
Affiliation:
Paul Scherrer Institut, CH-5232 Villigen PSI, Switzerland.
Elizabeth Müller
Affiliation:
Paul Scherrer Institut, CH-5232 Villigen PSI, Switzerland.
Hans Sigg
Affiliation:
Paul Scherrer Institut, CH-5232 Villigen PSI, Switzerland.
Detlev Grützmacher
Affiliation:
Paul Scherrer Institut, CH-5232 Villigen PSI, Switzerland.
Ulf Gennser
Affiliation:
LPN-CNRS, Marcoussis, France.
Isabelle Sagnes
Affiliation:
LPN-CNRS, Marcoussis, France.
Stefan Blunier
Affiliation:
Institut für Mechanische Systeme, ETH, 8092 Zürich.
Thomas Fromherz
Affiliation:
Institut für Halbleiterphysik, Universität Linz, A-4040 Linz, Austria.
Yves Campidelli
Affiliation:
ST Microelectronics, F-38926 Crolles-Cedex, France.
Oliver Kermarrec
Affiliation:
ST Microelectronics, F-38926 Crolles-Cedex, France.
Daniel Bensahel
Affiliation:
ST Microelectronics, F-38926 Crolles-Cedex, France.
Jerome Faist
Affiliation:
Université de Neuchatel, CH-2000 Neuchatel, Switzerland.
Get access

Abstract

The primary challenges in implementing a Si based quantum cascade laser are discussed. Intersubband absorption measurements were carried out on a series of modulation doped multiquantum well structures. The spectra were compared to the predictions of a 6 band k.p model, which confirmed the excellent accuracy of the model, and its ability to predict the bandstructures of more complicated cascade structures. A detailed structural analysis demonstrated excellent growth quality, with an interface roughness of < 0.4 nm. Electroluminescence measurements on cascade structures with doped contacts, processed as finger structures and waveguides of various sizes, enabled a quantitative analysis of the active region performance. The upper state lifetime τnr was ∼ 100 fs, leading to a total active region optical gain of ∼ 2 cm−1, a factor of ∼ 10 lower than the estimated total losses due to free carrier absorption. The total emitted power and the linewidth of the intersubband emission saturate above ∼ 6.5 kA/cm2, probably due to misalignment of the injector levels at high biases. The effect of leak currents and interspersed light hole states on the intersubband emission are considered.

Type
Research Article
Copyright
Copyright © Materials Research Society 2005

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1] Green, M.A., Zhao, J., Wang, A., Reece, P.J., Gal, M., Nature 412, 805, (2001).Google Scholar
[2] Faist, J., Capasso, F., Sivco, D.L., Sirtori, C., Hutchinson, A.L., Cho, A.Y., Science 264, 553, (1994).Google Scholar
[3] Beck, M., Hofsetter, D., Aellen, T., Faist, J., Oesterle, U., Ilegems, M., Gini, E., Melchior, H., Science 295, 301, (2002).Google Scholar
[4] Barbieri, S., Alton, J., Beere, H., Fowler, J., Linfield, E., Richie, D., APL 85 (10), p1674, (2004).Google Scholar
[5] Dehlinger, G., Diehl, L., Gennser, U., Sigg, H., Faist, J., Ensslin, K., Grützmacher, D., Müller, E., Science 290, 2277, (2000).Google Scholar
[6] Faist, J., Beck, M., Aellen, T., APL 78 (147), (2001).Google Scholar
[7] Falub, C.V., Meduña, M., Muller, E., Tsujino, S., Borak, A., Sigg, H., Grützmacher, D., Fromherz, T., Bauer, G., “Structural studies of strain symmetrised modulation-doped Si/SiGe structures grown by molecular beam epitaxy”, to be published in J. of Cryst. Growth.Google Scholar
[8] Tsujino, S., Falub, C.V., Müller, E., Scheinert, M., Diehl, L., Gennser, U., Fromherz, T., Borak, A., Sigg, H., Grützmacher, D., Campidelli, Y., Kermarrec, O., Bensahel, D., APL 84 (15), 2829, (2004).Google Scholar
[9] Gennser, U., Scheinert, M., Diehl, L., Tsujino, S., Borak, A., Falub, C., Grützmacher, D., Weber, A., Maude, D.K., Campidelli, Y., Kermarrec, O. and Bensahel, D., “Spin and Angular Momentum Conservation During Tunnelling through Semiconductor Barriers”, to be published.Google Scholar
[10] Fromherz, T., Koppensteiner, E., Helm, M., Bauer, G., Nützel, J.F., and Abstreiter, G., PRB 50 (20), 15073, (1994).Google Scholar
[11] Diehl, L., Mentese, S., Müller, E., Grützmacher, D., Sigg, H., Gennser, U.. Sagnes, I., Campidelli, Y., Kermarrec, O., Bensahel, D., Faist, J., APL 81 (25), 4700, (2002).Google Scholar
[12] Tsujino, S., Borak, A., Muller, E., Scheinert, M., Falub, C.V., Sigg, H., Grutzmacher, D., Giovannini, M., Faist, J., “Interface roughness induced broadening of intersubband electroluminescence in p-SiGe and n-GaInAs / AlInAs quantum cascade structures”, to be published in APL.Google Scholar
[13] Bormann, I., Brunner, K., Hackenbuchner, S., Abstreiter, G., Schmult, S., Wegscheider, W., APL 83 (26), 5371, (2003).Google Scholar