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New transparent conductors anatase Ti1−xMxO2 (M=Nb,Ta): transport and optical properties

Published online by Cambridge University Press:  26 February 2011

Yutaka Furubayashi ,
Taro Hitosugi ,
Yukio Yamamoto ,
Yasushi Hirose ,
Makoto Otani ,
Kiyomi Nakajima ,
Toyohiro Chikyow ,
Toshihiro Shimada  and
Tetsuya Hasegawa
Yutaka Furubayashi
Affiliation:
furubayashi@ksp.or.jp, Kanagawa Academy of Science and Technology, Hasegawa project, KSP east 504, 3-2-1 Sakado,Takatsu-ku, Kawasaki, N/A, 213-0012, Japan, +81-44-819-2081, +81-44-819-2083
Taro Hitosugi
Affiliation:
hitosugi@chem.s.u-tokyo.ac.jp, Kanagawa Academy of Science and Technology, Hasegawa project, Japan
Yukio Yamamoto
Affiliation:
yukio@yamamoto.ac, Kanagawa Academy of Science and Technology, Hasegawa project, Japan
Yasushi Hirose
Affiliation:
hirose@ksp.or.jp, Kanagawa Academy of Science and Technology, Hasegawa project, Japan
Makoto Otani
Affiliation:
makoto.otani@nist.gov, Kanagawa Academy of Science and Technology, Hasegawa project, Japan
Kiyomi Nakajima
Affiliation:
NAKAJIMA.Kiyomi@nims.go.jp, National Institute for Material Science, Japan
Toyohiro Chikyow
Affiliation:
CHIKYO.Toyohiro@nims.go.jp, National Institute for Material Science, Japan
Toshihiro Shimada
Affiliation:
shimada@chem.s.u-tokyo.ac.jp, Kanagawa Academy of Science and Technology, Hasegawa project, Japan
Tetsuya Hasegawa
Affiliation:
hasegawa@chem.s.u-tokyo.ac.jp, Kanagawa Academy of Science and Technology, Hasegawa project, Japan
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Abstract

We have discovered new transparent conducting oxides (TCOs), anatase Ti1-xMxO2 (M=Nb,Ta), in thin film form. Both films with 0.03 ≤ × ≤ 0.06 showed resistivity of 2−3 × 10−4 Ωcm and internal transmittance of ∼95% in the visible light region (40 nm in thickness), at room temperature. These values are comparable to those of typical TCOs, such as In2−xSnxO3 (ITO).

Keywords

transparent conductorelectrical propertiesoptical properties
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 905: Symposium DD – Materials for Transparent Electronics , 2005 , 0905-DD02-01
Copyright
Copyright © Materials Research Society 2006

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