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Ion Induced Damage and their Annealing in LiTaO3 Single Crystal

Published online by Cambridge University Press:  21 February 2011

Z Zhang ,
I.A. Rusakova  and
W.K. Chu
Z Zhang
Affiliation:
Texas Center for Superconductivity and Department of Physics, University of Houston, Houston, TX 77204–5932
I.A. Rusakova
Affiliation:
Texas Center for Superconductivity and Department of Physics, University of Houston, Houston, TX 77204–5932
W.K. Chu
Affiliation:
Texas Center for Superconductivity and Department of Physics, University of Houston, Houston, TX 77204–5932
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Abstract

LiTaO3 single crystals have been implanted with 100 keV oxygen ions at room temperature with doses of 1×1014 /cm2,6xl014/cm2,1.2x1015/cm2, 6xl015/cm2, and 2xl016/cm2. Annealing temperatures ranged from 550 °C to 1075 °C. RBS-channeling and TEM were used for characterization. For partially damaged samples, complete recovery of the crystalline structure was achieved after annealing at 550 °C, which is below the Curie temperature. For totally amorphized samples, thermal annealing induced multidomain growth. These domains extend beyond the original amorphous/crystal interface deep into bulk (1 – 1.5 μm ).

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 396: Symposium A – Ion-Solid Interactions for Materials Modification and Processing , 1995 , 273
Copyright
Copyright © Materials Research Society 1996

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