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Enhanced Hardness and Stress-Driven Delamination in Fe/Pt Multilayers

Published online by Cambridge University Press:  15 February 2011

B.J. Daniels ,
W.D. Nix  and
B.M. Clemens
B.J. Daniels
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, CA 94305-2205
W.D. Nix
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, CA 94305-2205
B.M. Clemens
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, CA 94305-2205
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Abstract

Polycrystalline Fe/Pt multilayers of varying bilayer period, Λ, were sputter deposited onto SiO2 at room temperature. Film structure was characterized by x-ray diffraction, hardness was determined using nanoindentation, and stresses were examined with wafer curvature. The Fe layers were shown to be predominantly {110} oriented while the Pt layers were mostly {111} oriented. The hardnesses of these multilayer films were enhanced over the rule of mixtures value by a factor of almost 3 and exhibited a dependence on Λ which was similar to that previously observed in epitaxial Fe(001)/Pt(001) multilayers. The hardnesses of the polycrystalline multilayers were higher than those of the epitaxial multilayers, presumably due to grain boundary strengthening in these films. Film stress was large (∼1.5 GPa) and compressive, resulting in buckling-driven delamination of the film from the substrate for films with 40≤Λ≤100 Å. Delamination occurred in the “telephone cord” morphology and was observed in real time. A qualitative discussion of our observations of this delamination mechanism is presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 382: Symposium G – Structure and Properties of Multilayered Thin Films , 1995 , 315
Copyright
Copyright © Materials Research Society 1995

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References

REFERENCES

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