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Characterizat Ion of thin Pzt Films on Platinlm Films

Published online by Cambridge University Press:  25 February 2011

Koichi Kugimiya ,
Ichiro Ueda  and
Kenji Iizima
Koichi Kugimiya
Affiliation:
Central Research Laboratories, Matsushita Electric Industrial Co. Ltd., Moriguchi, Osaka 570, Japan
Ichiro Ueda
Affiliation:
Central Research Laboratories, Matsushita Electric Industrial Co. Ltd., Moriguchi, Osaka 570, Japan
Kenji Iizima
Affiliation:
Central Research Laboratories, Matsushita Electric Industrial Co. Ltd., Moriguchi, Osaka 570, Japan
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Abstract

Anomalous layers 20-40nm thick were found at the interfaces of lead zirconate-titanate films and Pt electrode films. Detailed study has shown evidence that absorption of PbO by Pt during sputtering resulted in a Pb deficiency in the PZT films and the formation of PbTi3O7 phase. The anomaly was also partly due to island formation at the initial PZT film deposition which allowed PbO to react with Pt films. The Pb controlled PZT films 50nm thick exhibited excellent ferroelectric properties comparable to thicker ones.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 243: Symposium G – Ferroelectric Thin Films II , 1991 , 179
Copyright
Copyright © Materials Research Society 1992

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