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2d Modeling of Laser Induced Plasma Expansion

  • H.C. Le (a1), D. Zeitoun (a2), Y. Burtschell (a2), W. Marine (a1), M. Sentís (a1) and R.W. Dreyus (a1)...

Abstract

An axisymmetric two-dimensional modeling of plasma expansion in background gas is carried out to provide a better understanding of pulsed laser deposition (PLD) processes. This model takes into account the plasma plume dynamics just after the laser ablation pulse. It is shown that hydrodynamic behaviour and thermal relaxation of the plasma are strongly dependent on the nature and the pressure of background gas. In good agreement with experimental results backward movement of particles is clearly identified at a late expansion stage (≥ 2 μs).

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1 Vertes, A., Dreyfus, R.W. and Platt, D.E., IBM, Journal of Research and Developpement, Vol.38, N°l, January 1994.
2 Chen, K.R., Leboeuf, J.N., Wood, R.F., Geohegan, D.B., Donato, J.M., Liu, C.L., and Puretzky, A.A., Proceeding ‘Third International Conference on Laser Ablation-COLA'95‘.
3 Movtchan, I.A., Marine, W., Dreyfus, R.W., Le, H.C., Sentis, M. and Autric, M., Proceeding ‘Third International Conference on Laser Ablation-COLA'95‘.
4 Shinn, G.B., Steigerwald, F., Stiegler, H., Sauerbrey, R., Tittel, F.K., and Wilson, W.L., J.Vac.Sci.Technol. B4, 1273 (1986)
5 Oran, E.S. and Boris, J.P., ‘Numerical Simulation of Reactive Flow', Elsevier, New-York, 1987.
6 Le, H.C., Vuillon, J., Zeitoun, D., Marine, W., Sentis, M. and Dreyfus, R.W., Proceeding ‘Third International Conference on Laser Ablation-COLA'95'.

2d Modeling of Laser Induced Plasma Expansion

  • H.C. Le (a1), D. Zeitoun (a2), Y. Burtschell (a2), W. Marine (a1), M. Sentís (a1) and R.W. Dreyus (a1)...

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