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The Thermal Stability of Thin Copper Films Deposited on TiO2(110) Studied by Scanning Tunneling Microscopy

Published online by Cambridge University Press:  31 January 2011

D. L. Carroll ,
M. Wagner ,
M. Rühle  and
D. A. Bonnell
D. L. Carroll
Affiliation:
Department of Materials Science and Engineering, University of Pennsylvania, Philadelphia, Pennsylvania 19104–6272
M. Wagner
Affiliation:
Max-Planck-Institut für Metallforschung, Institut für Werkstoffwissenschaft, D–70174 Stuttgart, Germany
M. Rühle
Affiliation:
Max-Planck-Institut für Metallforschung, Institut für Werkstoffwissenschaft, D–70174 Stuttgart, Germany
D. A. Bonnell
Affiliation:
Department of Materials Science and Engineering, University of Pennsylvania, Philadelphia, Pennsylvania 19104–6272
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Abstract

The morphology of Cu thin films is strongly dependent on the temperature of the substrate during and after deposition. Films grown at temperatures between 300 °C and 400 °C form clusters distributed in close packed domains and isolated clusters across the surface. Increased substrate temperatures result in cluster shape evolution indicative of mass flow and sintering. Deposition of Cu at substrate temperatures higher than 500 °C results in a completely different morphology of the film and the suppression of cluster formation. Annealing these Cu films to temperatures of 700 °C allows the system to relax into an equilibrium state characterized by large facets in the film and large areas of exposed surface. These observations are discussed in terms of basic thermodynamic data for bulk Cu oxidation and surface tensions for this system.

Type
Articles
Information
Journal of Materials Research , Volume 12 , Issue 4 , April 1997 , pp. 975 - 983
Copyright
Copyright © Materials Research Society 1997

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References

1. For current status of the field, see, for example, Structure and Properties of Interfaces in Ceramics, edited by Bonnell, D., Rühle, M., and Chowdhry, U. (Mater. Res. Soc. Symp. Proc. 357, Pittsburgh, PA, 1995).Google Scholar
2.Guo, Q. and Møller, P. J., Surf. Sci. 244, 228 (1991).CrossRefGoogle Scholar
3.Henrich, V. and Cox, P. A., The Surface Science of Metal Oxides (Cambridge University Press, Cambridge, 1994), p. 392.Google Scholar
4.Altman, E. I. and Gorte, R., J. Cat. 110, 191–196 (1988).CrossRefGoogle Scholar
5.Onishi, H., Aruga, T., Egawa, C., and Iwasawa, Y., Surf. Sci. 199, 54–66 (1988).CrossRefGoogle Scholar
6.Lo, W. J., Chung, Y. W., and Somorjai, G. A., Surf. Sci. 71, 199–219 (1978).Google Scholar
7.Rocker, G. and Göpel, W., Surf. Sci. 77, 301–320 (1987).Google Scholar
8.See, A. K. and Bartynski, R. A., J. Vac. Sci. Technol. A 10, 2591–2632 (1992).CrossRefGoogle Scholar
9.Zhang, Z. and Henrich, V. E., Surf. Sci. 277, 263–272 (1992).CrossRefGoogle Scholar
10.Deng, J., Wang, D., Wei, X., Zhai, R., and Wang, H., Surf. Sci. 249, 213–222 (1991).Google Scholar
11.Pan, J. M. and Madey, T. E., J. Vac. Sci. Technol. A 11 (in press).Google Scholar
12.Onishi, H., Aruga, T., Egawa, C., and Iwasawa, Y., Surf. Sci. 233, 261–268 (1990).CrossRefGoogle Scholar
13.Kao, C. C., Tsai, S. C., Bahl, M. K., Chung, Y. W., and Lo, W. J., Surf. Sci. 95, 1–14 (1980).CrossRefGoogle Scholar
14.Wu, M. C. and Møller, P. J., The Structure of Surfaces III, edited by Tong, S. Y., Van Hove, M. A., Takayanagi, K., and Xie, X. D. (Springer-Verlag, Berlin, 1991), pp. 652–659.Google Scholar
15.Tamura, K., Bardi, U., and Nihei, Y., Surf. Sci. 216, 209–221 (1989).CrossRefGoogle Scholar
16.Sadeghi, H. R. and Henrich, V. E., Surf. Sci. 19, 330–340 (1984).CrossRefGoogle Scholar
17.Sadeghi, H. R. and Henrich, V. E., J. Cat. 109, 1–11 (1988).CrossRefGoogle Scholar
18.Pan, J-M., Diebold, U., Zhang, J., and Madey, T. E., Surf. Sci. 295, 411 (1993).CrossRefGoogle Scholar
19.Møller, P. J. and Wu, M. C., Surf. Sci. 224, 265–276 (1989).CrossRefGoogle Scholar
20.Wu, M. C. and Møller, P. J., Surf. Sci. 224, 250–264 (1989).CrossRefGoogle Scholar
21.Wu, M. C. and Møller, P. J., Surf. Sci. 235, 228–234 (1990).CrossRefGoogle Scholar
22.Diebold, U., Pan, J-M., and Madey, T. E., Phys. Rev. B 47, 3868 (1993).CrossRefGoogle Scholar
23.Liang, Y., Carroll, D. L., and Bonnell, D. A., Structure and Properties of Interfaces in Ceramics, edited by Bonnell, D., Rühle, M., and Chowdhry, U. (Mater. Res. Soc. Symp. Proc. 357, Pittsburgh, PA, 1995), p. 3.Google Scholar
24.Dake, L. S. and Lad, R. J., Surf. Sci. 289, 297 (1993).CrossRefGoogle Scholar
25.Carroll, D. L., Liang, Y., and Bonnell, D. A., J. Vac. Sci. Technol. A 12, 2298 (1994).CrossRefGoogle Scholar
26.Thibado, P., Ph.D. Thesis, University of Pennsylvania (1995).Google Scholar
27.Novak, D., private communication (work to be published).Google Scholar
28.Novak, D., Garfunkel, E., and Gustafsson, T., Phys. Rev. B, Rapid Comm. 50, 5000 (1994).CrossRefGoogle Scholar
29. Vapor Pressure Tables (RCA).Google Scholar
30.Nieminen, J. A. and Kaski, K., Phys. Rev. A 40, 2088 (1989).CrossRefGoogle Scholar
31.Bonzel, H. P., The Phenomenology of Surface Diffusion (Marcel Dekker Publishing, 1969), p. 279.Google Scholar
32.Bales, G. S., Bruinsma, R., Eklung, E. A., Karunasiri, R. P. U., Rudnick, J., and Zangwill, A., Science 249, 264 (1990).CrossRefGoogle Scholar
33.Golubovic, L. and Bruinsma, R., Phys. Rev. Lett. 66, 321 (1991).CrossRefGoogle Scholar
34.Ernst, K. H., Ludviksson, A., Thang, R., Yoshihara, J., and Campbell, C. T., Phys. Rev. B (unpublished).Google Scholar
35.Schmidt, J. N., Ph.D. Thesis, University of Liege (1974).Google Scholar
36.Overbury, S. H., Bertrand, P. A., and Somorjai, G. A., Chem. Rev. 75, 547 (1975).CrossRefGoogle Scholar
37.Lu, P. and Cosandey, F., Interface Sci. 2, 169 (1990).CrossRefGoogle Scholar
38.Chung, Y. W., Lo, W. J., and Somorjai, G. A., Surf. Sci. 64, 588 (1977).CrossRefGoogle Scholar
39.Henrich, V. and Cox, P. A., The Surface Science of Metal Oxides (Cambridge University Press, Cambridge, 1994), p. 42.Google Scholar
40.Henrich, V. and Cox, P. A., The Surface Science of Metal Oxides (Cambridge University Press, Cambridge, 1994), p. 181.Google Scholar
41.Aglickij, V. A., Pirometali. raf. medi. Metallurgiya, Moscow (1971).Google Scholar
42.Gebhardt, E. and Obrowski, W., Z. Metallk. 45, 333 (1954).Google Scholar
43.Journal of Physical and Chemical Reference Data, Vol. 14, Supp. 1, JANAF Thermochemical Tables, 3rd ed. (American Chemical Society, Washington, DC, 1985).Google Scholar