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Investigation of minute strain in silicon on insulator and strained-silicon/silicon–germanium/silicon-substrate semiconductor materials using a synchrotron radiation X-ray microbeam

Published online by Cambridge University Press:  14 January 2011

J. Matsui ,
Y. Tsusaka ,
H. Takano ,
Y. Kagoshima ,
T. Senda ,
K. Izunome ,
T. Horikawa ,
Y. Urushihara  and
K. Yokoyama
J. Matsui*
Affiliation:
Synchrotron Radiation Nanotechnology Laboratory, Hyogo Science and Technology Association, 3-1-1, Kouto, Kamigori-cho, Ako-gun, Hyogo, 678-1205Japan
Y. Tsusaka
Affiliation:
Graduate School of Material Science, University of Hyogo, 3-2-1, Kouto, Kamigori-cho, Ako-gun, Hyogo, 678-1297Japan
H. Takano
Affiliation:
Graduate School of Material Science, University of Hyogo, 3-2-1, Kouto, Kamigori-cho, Ako-gun, Hyogo, 678-1297Japan
Y. Kagoshima
Affiliation:
Graduate School of Material Science, University of Hyogo, 3-2-1, Kouto, Kamigori-cho, Ako-gun, Hyogo, 678-1297Japan
T. Senda
Affiliation:
Covalent Materials Corporation, 6-861-5, Toko, Seiro-cho, Kitakanbara-gun, Niigata, 957-0197Japan
K. Izunome
Affiliation:
Covalent Materials Corporation, 6-861-5, Toko, Seiro-cho, Kitakanbara-gun, Niigata, 957-0197Japan
T. Horikawa
Affiliation:
Graduate School of Material Science, University of Hyogo, 3-2-1, Kouto, Kamigori-cho, Ako-gun, Hyogo, 678-1297Japan
Y. Urushihara
Affiliation:
Synchrotron Radiation Nanotechnology Laboratory, Hyogo Science and Technology Association, 3-1-1, Kouto, Kamigori-cho, Ako-gun, Hyogo, 678-1205Japan
K. Yokoyama
Affiliation:
Synchrotron Radiation Nanotechnology Laboratory, Hyogo Science and Technology Association, 3-1-1, Kouto, Kamigori-cho, Ako-gun, Hyogo, 678-1205Japan
*
†Email address for correspondence:matsui@hyogosta.jp
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Abstract

Strain in silicon on insulator (SOI) and strained-silicon(s-Si)/silicon–germanium (SiGe)/Si-substrate crystals is analysed by means of synchrotron X-ray microbeam diffraction. It is found that strain features of the s-Si/SiGe/Si crystals are much different from those of SOI crystals from the lattice tilt and lattice parameter distribution points of view. The two-dimensional lattice tilt maps obtained by scanning the synchrotron X-ray microbeam of about 1 μm in size on the sample surface are useful to study local strain distribution in those materials.

Type
Contributed paper
Information
Diamond Light Source Proceedings , Volume 1 , Issue SRMS-7 , October 2010 , e122
Copyright
Copyright © Diamond Light Source Ltd 2011

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References

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