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Multiple Scattering Contributions of Thin Films in Reflection Geometry
Published online by Cambridge University Press: 06 March 2019
Abstract
The multiple scattering contributions to the emitted intensity of a thin homogeneous sample under X-Ray excitation are studied with recourse to the Boltzmann transport theory. The corrective terms to the XRF characteristic line due to a second collision of either the photoelectric effect (secondary XRF), or the Compton, or the Rayleigh scattering, are deduced for reflection geometry. Analytical expressions for the intensities are given that allow their computation for variable incidence and take-off beam directions and source wavelength.
- Type
- XI. Thin-Film and Surface Characterization by XRS and XPS
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- Copyright © International Centre for Diffraction Data 1991