Skip to main content Accessibility help
×
Hostname: page-component-8448b6f56d-c4f8m Total loading time: 0 Render date: 2024-04-19T20:28:07.424Z Has data issue: false hasContentIssue false

6 - Dislocation formation in epitaxial systems

Published online by Cambridge University Press:  06 July 2010

L. B. Freund
Affiliation:
Brown University, Rhode Island
S. Suresh
Affiliation:
Massachusetts Institute of Technology
Get access

Summary

The generation of film stress as a natural consequence of epitaxial constraint arising from mismatch between the lattice parameters of a thin film and its substrate was discussed in Section 1.7, and elastic strain induced in layered epitaxial materials was analyzed in Section 3.4. The stress associated with the elastic strain acts as a driving force for formation and growth of structural defects. An image of dislocations that have formed at the interface between SiGe and Si in this way appears as Figure 1.16 and a second image of dislocations that have been formed at the interface between CdTe and GaAs appears as Figure 1.18. The presence of such misfit dislocations, in turn, can have a detrimental effect on the performance of strained layer material systems. Lattice strain in SiGe materials alters the electronic bandgap, a behavior that can be exploited to good advantage in some circumstances. Strain can also alter band edge alignment, thereby converting an indirect bandgap material into a direct bandgap material and rendering it a candidate material for optoelectronic applications. In cases in which lattice strain is induced to achieve some functional objectives, the formation of strain-relieving dislocations can be particularly deleterious as noted in Section 7.3.2. Even for cases in which it is not essential that the strain be maintained, the presence of dislocations can have an adverse effect on electronic performance of semiconductor materials, serving as easy diffusion paths for dopants or as recombination centers to diminish carrier density in devices (Mahajan 2000).

Type
Chapter
Information
Thin Film Materials
Stress, Defect Formation and Surface Evolution
, pp. 387 - 463
Publisher: Cambridge University Press
Print publication year: 2004

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Save book to Kindle

To save this book to your Kindle, first ensure coreplatform@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about saving to your Kindle.

Note you can select to save to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be saved to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Available formats
×

Save book to Dropbox

To save content items to your account, please confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your account. Find out more about saving content to Dropbox.

Available formats
×

Save book to Google Drive

To save content items to your account, please confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your account. Find out more about saving content to Google Drive.

Available formats
×