Microscopy and Microanalysis: Volume 22 -

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Microscopy and Microanalysis
ISSN: 1431-9276

EISSN: 1435-8115

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Microscopy and Microanalysis

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Volume 22 - February 2016

Analytical and Instrumentation Science Symposia

Advances in Scanning Electron/Ion Instrumentation and Detectors

Abstract

Patterned Wafer Inspection with Multi-beam SEM Technology

Towards Enhancing the Throughput and Eliminating the 4 Dimensions of Stitching Errors in Large Area, High Resolution SEM for Integrated Circuit Reverse Engineering and Connectomics

IPrep – Automated Serial-Section Broad-Ion-Beam Tomography

Silicon Photomultipliers: Properties, Latest Developments at FBK and Applications.

Figure of Merit of Silicon Photomultiplier/Scintillator Electron Detector

Real-World Electron Detector Performance in Scanning Electron Microscopes

How New Electron Detector Concepts Can Help to Increase Throughput and Sensitivity of Single-and Multi-Beam Scanning Electron Microscopes

Nanoscale Imaging of Structural and Optical Properties Using Helium Temperature Scanning Transmission Electron Microscopy Cathodoluminescence of Nitride Based Nanostructures

Nanoscale Cathodoluminescence of an InGaN Single Quantum Well Intersected by Individual Dislocations

STEM/SEM, Chemical Analysis, Atomic Resolution and Surface Imaging At ≤ 30 kV with No Aberration Correction for Nanomaterials on Graphene Support

Is It Possible to Image the Auger Electron Signal in a Conventional SEM Using a Segmented Annular BSED and Stage Bias?

Comparison of Secondary, Backscattered and Low Loss Electron Imaging for Dimensional Measurements in the Scanning Electron Microscope - Part 2

New Methods for Measuring Chemistry and Temperature Using Scanning Ion and Electron Beams

Hydrogen Ion Beams from Nanostructured Gas Field Ion Sources

Novel Scanning Ion Microscope with H3+ Gas Field Ionization Source

Reactive Gas Ion Beam Generation Using Single Atom W(111) Gas Field Ion Sources

Nanometer Scale Time of Flight Back Scattering Spectrometry in the Helium Ion Microscope

Image Simulation and Analysis to Predict the Sensitivity Performance of a Multi-Electron Beam Wafer Defect Inspection Tool

Design of a HAADF Detector for Z Contrast in SEM

A Combination BSE and CL Detector using Silicon Photomultipliers

Microscopy and Microanalysis

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Volume 22 - February 2016

Analytical and Instrumentation Science Symposia

Advances in Scanning Electron/Ion Instrumentation and Detectors

Abstract