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Is It Possible to Image the Auger Electron Signal in a Conventional SEM Using a Segmented Annular BSED and Stage Bias?

Published online by Cambridge University Press:  25 July 2016

B.J. Griffin ,
A.A. Suvorova ,
D.C. Joy  and
J.R. Michael
B.J. Griffin
Affiliation:
Centre for Microscopy, Characterization and Analysis, The University of Western Australia, Crawley, WA Australia
A.A. Suvorova
Affiliation:
Centre for Microscopy, Characterization and Analysis, The University of Western Australia, Crawley, WA Australia
D.C. Joy
Affiliation:
Center for NanoPhase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN
J.R. Michael
Affiliation:
Sandia National Laboratories, PO Box 5800, Albuquerque, NM

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 606 - 607
Copyright
© Microscopy Society of America 2016 

References

References:

[1] Griffin, B.J., Joy, D.C. & Michael, J. (2015). Microsc Microanal 20, (S2:Proc.).Google Scholar
[2] Reimer, L. (1998). Scanning Electron Microscopy. Springer, 527. pp.Google Scholar
[3] Buckley, D.H. (1970). NASA TN D-7010.Google Scholar
[4] FEI is acknowledged for access to their DBS modelling software.Google Scholar
[5] Sandia is a multiprogram laboratory operated by Sandia Corporation, a Lockheed Martin Company, for the United States Department of Energy (DOE) under contract DE- AC0494AL85000.Google Scholar