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Is It Possible to Image the Auger Electron Signal in a Conventional SEM Using a Segmented Annular BSED and Stage Bias?
Published online by Cambridge University Press: 25 July 2016
Abstract
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- Information
- Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 606 - 607
- Copyright
- © Microscopy Society of America 2016
References
References:
[4] FEI is acknowledged for access to their DBS modelling software.Google Scholar
[5] Sandia is a multiprogram laboratory operated by Sandia Corporation, a Lockheed Martin Company, for the United States Department of Energy (DOE) under contract DE- AC0494AL85000.Google Scholar