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New Methods for Measuring Chemistry and Temperature Using Scanning Ion and Electron Beams

Published online by Cambridge University Press:  25 July 2016

Robert Hull ,
Hamed Paraveneh  and
Xiaowei Wu
Robert Hull
Affiliation:
Department of Materials Science and Engineering, Rensselaer Polytechnic Institute, Troy, NY
Hamed Paraveneh
Affiliation:
Department of Materials Science and Engineering, Rensselaer Polytechnic Institute, Troy, NY Now at IBM - GLOBALFOUNDRIES, Route 52, Hopewell Junction, NY
Xiaowei Wu
Affiliation:
Department of Materials Science and Engineering, Rensselaer Polytechnic Institute, Troy, NY Now at Applied Materials, 3330 Scott Blvd, Santa Clara, CA

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 610 - 611
Copyright
© Microscopy Society of America 2016 

References

References:

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[7] This work was primarily supported by New York State under NYSTAR / SUNY INDEX C090113 (ThSEM), and NYSTAR Focus Center C080117 (FIB-AES and ThSEM). The integration of the MS-FIB into the XPS system for the FIB-AES work was enabled by an NSF-MRI grant 0923181. We gratefully acknowledge the technical assistance of Mr. Rob Planty and Mr. Ray Dove.Google Scholar