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Comparison of Secondary, Backscattered and Low Loss Electron Imaging for Dimensional Measurements in the Scanning Electron Microscope - Part 2

Published online by Cambridge University Press:  25 July 2016

Michael T. Postek ,
John Villarrubia ,
András E. Vladár  and
Atsushi Muto
Michael T. Postek
Affiliation:
National Institute of Standards and Technology, Physical Measurement Laboratory, Gaithersburg, MD
John Villarrubia
Affiliation:
National Institute of Standards and Technology, Physical Measurement Laboratory, Gaithersburg, MD
András E. Vladár
Affiliation:
National Institute of Standards and Technology, Physical Measurement Laboratory, Gaithersburg, MD
Atsushi Muto
Affiliation:
Hitachi High Technologies America, Clarksburg, MD

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 608 - 609
Copyright
© Microscopy Society of America 2016 

References

References:

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[2] Certain commercial equipment is identified in this report to adequately describe the experimental procedure. Such identification does not imply recommendation or endorsement by the National Institute of Standards and Technology, nor does it imply that the equipment identified is necessarily the best available for the purpose.Google Scholar
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