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Sol-gel processing of strontium-barium niobate ferroelectric thin film

Published online by Cambridge University Press:  31 January 2011

Ren Xu ,
Yuhuan Xu ,
Ching Jih Chen  and
John D. Mackenzie
Ren Xu
Affiliation:
Department of Materials Science and Engineering, University of California, Los Angeles, California 90024
Yuhuan Xu
Affiliation:
Department of Materials Science and Engineering, University of California, Los Angeles, California 90024
Ching Jih Chen
Affiliation:
Department of Materials Science and Engineering, University of California, Los Angeles, California 90024
John D. Mackenzie
Affiliation:
Department of Materials Science and Engineering, University of California, Los Angeles, California 90024
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Abstract

Ferroelectric thin film of strontium-barium niobate was successfully fabricated by the sol-gel technique. The films were made on several types of substrate, including quartz, single crystal silicon wafer, and glass slides. The processing temperature was as low as 700 °C. The film obtained with thickness of 3000 Å was dense, transparent, and showed excellent ferroelectricity.

Type
Materials Communications
Information
Journal of Materials Research , Volume 5 , Issue 5 , May 1990 , pp. 916 - 918
Copyright
Copyright © Materials Research Society 1990

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References

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