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High-Tc superconducting NbN films with low particulate density grown at 25 °C using pulsed laser deposition

Published online by Cambridge University Press:  31 January 2011

Anupama B. Kaul ,
Timothy D. Sands  and
Theodore Van Duzer
Anupama B. Kaul
Affiliation:
Department of Materials Science and Engineering, University of California, Berkeley, California 94720
Timothy D. Sands
Affiliation:
Department of Materials Science and Engineering, University of California, Berkeley, California 94720
Theodore Van Duzer
Affiliation:
Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720
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Abstract

The growth and characterization of high-Tc NbN films formed on room temperature substrates by pulsed laser deposition is described. The growth was performed at a high laser power density (>5 × 108 W/cm2), where the enhanced reactivity of species in the plume is proposed as the mechanism for increased nitrogen incorporation in films on unheated substrates. The Tcs were 16.2 K on MgO and 13 K on SiNx/Si substrates. In addition to electrical transport measurements, the films were characterized using RBS and x-ray diffraction. The particulate density on films grown at high power density was significantly reduced, which is correlated with the Nb target having a smoother morphology, characteristic of a quenched molten surface layer in the ablated area.

Type
Rapid Communications
Information
Journal of Materials Research , Volume 16 , Issue 5 , May 2001 , pp. 1223 - 1226
Copyright
Copyright © Materials Research Society 2001

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