Hostname: page-component-78c5997874-t5tsf Total loading time: 0 Render date: 2024-11-17T19:30:37.766Z Has data issue: false hasContentIssue false
  • English
  • Français

Temperature Dependence of Ion Assisted Epitaxial Growth of Chemical Vapor Deposited Si Layers

Published online by Cambridge University Press:  26 February 2011

A. La Ferla ,
E. Rimini ,
C. Spinella  and
G. Ferla
A. La Ferla
Affiliation:
Dipartimento di Fisica - Corso Italia 57 - 195129 Catania -Italy.
E. Rimini
Affiliation:
Dipartimento di Fisica - Corso Italia 57 - 195129 Catania -Italy.
C. Spinella
Affiliation:
Dipartimento di Fisica - Corso Italia 57 - 195129 Catania -Italy.
G. Ferla
Affiliation:
SGS - Thomson - Stradale Primosole 50- 195100 Catania -Italy.
Get access

Abstract

Thin layers of Si were chemical vapor deposited onto as - received p-type <100> Si wafers and implanted with 80 KeV of As or Ge to a fluence of 1 × 1015 /cm2. Irradiation at 450°C with 600 KeV Kr++ ions causes the epitaxial growth of the entire deposited and amorphized Si layer. At lower irradiation temperatures the regrowth rate of the deposited layers is substantially reduced with respect that of the implanted amorphous layers. The presence of As enhances the regrowth rate of a factor 2.5. The results are explained qualitatively in terms of a dynamical bond breaking of SiO2, and of a dopant influence on the migration energy of the defects responsible for the growth.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 100: Symposium – A Fundamentals of Beam-Solid Interactions and Transient Thermal Processing , 1988 , 381
Copyright
Copyright © Materials Research Society 1988

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Williams, J. S. in “Surface Modification and Alloying” ed. Poate, s. J. M., Foti, C. and Jacobson, D. C. (Plenum Press, N. Y.:1985 Series 6) 133.Google Scholar
2. Olson, G. L., Mat. Res. Soc. Symp. Proc. 35, 25 (1985).Google Scholar
3. Chu, W. K., Lugujjo, E., Mayer, J. W. and Sigmon, T. W., Thin Solid Films 19, 329 (1973).CrossRefGoogle Scholar
4. von Allmen, M., Lau, S. S., Mayer, J. W. and Tseng, W. F., Appl. Phys. Lett. 35, 280 (1980).Google Scholar
5. Bean, J. C. and Poate, J. M., Appl. Phys. Lett. 36, 59 (1980).CrossRefGoogle Scholar
6. Williams, J. S., Elliman, R. G., Brown, W. L. and Seidel, T. E., Phys. Rev. Lett. 55, 1482 (1985).Google Scholar
7. Ferla, A.La, Cannavò, S., Ferla, G., Campisano, S. U., Rimini, E. and Servidori, M., Nucl. Instr. Meth. Phys. Res. B19/20,435 (1987).Google Scholar
8. Ferla, A.La, Campisano, S. U., Cannavò, S., Ferla, G. and Rimini, E. “Ion Beam Induced Epitaxial Regrowth: Orientation and Impurity Effects.” in Mat. Res. Soc. Meeting Strasburg 1987 - to be published.Google Scholar
9. Cullis, A. G., Seidel, T. E. and Meek, R. L., J. Appl. Phys. 49, 5188 (1978).Google Scholar
10. Ferla, A.La, Rimini, E. and Ferla, G. “Ion Induced Epitaxial Growth of Chemical Vapor Deposited Si Layers”, J. Appl. Phys. accepted for publication (1988).Google Scholar