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Synthesis of Granular Systems by Cluster Beam Deposition
Published online by Cambridge University Press: 15 February 2011
Abstract
Granular films were prepared by simultaneous cluster beam and physical vapor deposition. The clusters are formed by high pressure sputtering and have an average size between 2 and 5 nm. This method makes it possible to control the granule size and concentration, which is not possible using precipitation synthesis of granular alloys. Most importantly, a diverse set of granule/matrix systems are accessible by this system. The method is illustrated for systems of interest for giant magneto-resistance applications: Co/Cu (miscible), and Co/Cr (immiscible.) Synthesis of films with isolated embedded clusters of more complex structures, e.g. intermetallics Ni3Al and Cu3Au, are also discussed.
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- Copyright © Materials Research Society 1996