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RF Discharge Modeling Through Solutions to the Moments of the Boltzmann Transport Equations

Published online by Cambridge University Press:  21 February 2011

M. Meyyappan ,
T. R. Govindan  and
J. P. Kreskovsky
M. Meyyappan
Affiliation:
Scientific Research Associates, Glastonbury, CT 06033
T. R. Govindan
Affiliation:
Scientific Research Associates, Glastonbury, CT 06033
J. P. Kreskovsky
Affiliation:
Scientific Research Associates, Glastonbury, CT 06033
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Abstract

Simulation of if discharges through numerical solutions to the Moments of the Boltzmann Transport Equations (MBTE) is discussed. Continuity and momentum equations for the electrons and ions, and electron energy equation have been solved using an efficient finite difference scheme. Results for a 13.56 MHz argon discharge are presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 190: Symposium M – Plasma Processing and Synthesis of Materials III , 1990 , 149
Copyright
Copyright © Materials Research Society 1991

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References

REFERENCES

1. Meyyappan, M. and Kreskovsky, J. P., J. Appl. Physics, submitted 1990.Google Scholar
2. Graves, D. B. and Jensen, K F., IEEE Trans. Plasma Sci., PS-14 (2), 78 (1986).Google Scholar
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4. Meyyappan, M. and Buggeln, R. C., MRS Proceedings, 1989 Fall Meeting, November 1989.Google Scholar