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Quantitative High Resolution Transmission Electron Microscopy - The Role of Space Charge in Blurring Images

Published online by Cambridge University Press:  10 February 2011

A. M. Schwartz ,
J. M. Gibson  and
T. Zheng
A. M. Schwartz
Affiliation:
Department of Physics, University of Illinois, Urbana, IL 61801
J. M. Gibson
Affiliation:
Department of Physics, University of Illinois, Urbana, IL 61801
T. Zheng
Affiliation:
KLA Instruments, San Jose, CA 95161
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Abstract

We investigate space-charge by analytic methods and Monte Carlo simulations as a possible source of blur in high-resolution TEM images. In doing so we believe to have identified a novel type of space charge effect, namely quantum space charge(QSC) effect. We predict the blur for typical HRTEM images and for electron holograms. Inclusion of this hitherto unrecognized effect in image simulations (and experimental design for HRTEM and related techniques, such as holography) should permit further progress in the critical field of quantitative HRTEM image matching as a means for atomic structure determination.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 466: Symposium G – Atomic Resolution Microscopy of Surfaces and Interfaces , 1996 , 107
Copyright
Copyright © Materials Research Society 1997

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References

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