Phase evolution during crystallization of an amorphous TiAl film produced by physical vapor deposition (PVD) was studied using differential thermal analysis (DTA), x-ray diffraction (XRD), and transmission electron microscopy (TEM). The following sequence of phase transformations was observed during continuous heating from room temperature: amorphous → body centered cubic (β) → hexagonal close-packed (α) → tetragonal (γ) → ordered α2. The β phase was formed as near-spherical particles that were evenly distributed in the amorphous phase, and the size of these particles was approximately 90 nm. Formation of the α phase by decomposition of β and the remaining amorphous phases led to a very fine feathery-like microstructure arranged in colonies of approximately 100 nm in size. The transformation of the metastable α phase into a mixture of the γ and α2 phases led to formation of an equiaxed γ-grain structure with a grain size of about 150 nm after heating to 850°C.