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Nanofabrication Using Self-Assembled Alumina Templates

Published online by Cambridge University Press:  17 March 2011

Oded Rabin ,
Paul R. Herz ,
Stephen B. Cronin ,
Yu-Ming Lin ,
Akintunde I. Akinwande  and
Mildred S. Dresselhaus
Oded Rabin
Affiliation:
Massachusetts Institute of Technology, Cambridge, MA 02139, U.S.A. Dept. of Chemistry
Paul R. Herz
Affiliation:
Massachusetts Institute of Technology, Cambridge, MA 02139, U.S.A. Dept. of Electrical Engineering and Computer Science
Stephen B. Cronin
Affiliation:
Massachusetts Institute of Technology, Cambridge, MA 02139, U.S.A. Dept. of Physics
Yu-Ming Lin
Affiliation:
Massachusetts Institute of Technology, Cambridge, MA 02139, U.S.A. Dept. of Electrical Engineering and Computer Science
Akintunde I. Akinwande
Affiliation:
Massachusetts Institute of Technology, Cambridge, MA 02139, U.S.A. Dept. of Electrical Engineering and Computer Science
Mildred S. Dresselhaus
Affiliation:
Massachusetts Institute of Technology, Cambridge, MA 02139, U.S.A. Dept. of Electrical Engineering and Computer Science Dept. of Physics
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Abstract

A new approach for the use of porous alumina films as a template for nanofabrication is presented. In this process the porous films are prepared on silicon substrates, simplifying both the template fabrication and subsequent processing, and improving the quality of the films and their surfaces. Structural analysis of the film was carried out. Bismuth and bismuth telluride nanowires were prepared by pressure injection and electrochemical deposition, respectively, in alumina films 5-10 μ thick with parallel ordered pores 40 nm in diameter. The films were also patterned by lithography, offering new opportunities for area-selective anodization of non-planar structures. The new approach offers a straightforward method for the fabrication of arrays of nanostructures and their incorporation into electronic and optical devices.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 636: Symposium D – Nonlithographic and Lithographic Methods of Nanofabrication-From Ultralarge Scale , 2000 , D4.7.1
Copyright
Copyright © Materials Research Society 2001

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