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Metal/Al2O3 Multilayers As High-Temperature X-Ray Mirrors

Published online by Cambridge University Press:  15 February 2011

CH. Morawe  and
H. Zabel
CH. Morawe
Affiliation:
Ruhr-Universität Bochum, Institut für Experimentalphysik/Festkörperphysik, Bochum, Germany
H. Zabel
Affiliation:
Ruhr-Universität Bochum, Institut für Experimentalphysik/Festkörperphysik, Bochum, Germany
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Abstract

By if-sputtering we have prepared high-quality metal/Al2O3 (metal: Co, Pt, W) artificial multilayers on sapphire (1120) substrates. We obtain interface roughnesses of about 0.2 nm and x-ray reflectivities of nearly 100 % at the first satellite reflection using Cu Kα radiation. The multilayer structures remain stable up to 700°C – 900°C without appreciable loss in reflectivity. Annealing causes structural changes depending on the chosen metal. Pt/Al2O3 forms a coherent superlattice structure whereas Co and W exhibit a gradual internal oxidation at the metal/Al2O3 interface. Beyond 900°C all systems are destroyed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 382: Symposium G – Structure and Properties of Multilayered Thin Films , 1995 , 363
Copyright
Copyright © Materials Research Society 1995

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References

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