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Low Temperature Intermixing Reactions Between Silicon and Metals*

Published online by Cambridge University Press:  15 February 2011

Akio Hiraki
Affiliation:
Department of Electrical Engineering, Osaka University, Suita, Osaka 565(Japan)
T. Narusawa
Affiliation:
State University of New York, Albany, NY 12222(U.S.A.)
W. M. Gibson
Affiliation:
State University of New York, Albany, NY 12222(U.S.A.)
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Extract

Metal films such as gold, copper, nickel and palladium exhibit an interfacial intermixing reaction at room temperature with semiconductors with energy gaps Eg less than about 2.5 eV or dielectric constants ε larger than about 81. We have proposed a model2 of the triggering mechanism of this interfacial reaction based on the ability of a metal to screen coulombic interaction by its mobile free electrons. Such a screening may disturb the electron distribution responsible for the covalent bonding, and consequently it may make the semiconductor surface reactive towards the metal. In this respect, there must be a critical film thickness for the deposited metal film to behave as a true metal with sufficient mobile free electrons for the screening; therefore the reactivity of the semiconductor surface for the intermixing reaction must be dependent on the thickness of the deposited metal film. In favour of the screening model, we show that the reactivity of a silicon surface for intermixing or silicide formation with a gold or palladium film depends clearly on the film thickness.

Type
Research Article
Copyright
Copyright © Materials Research Society 1982

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Footnotes

*

Abstract of a paper presented at the Symposium on Thin Films and Interfaces, Boston, MA, U.S.A., November 16–19, 1981.

References

REFERENCES

1 Hiraki, A., Shuto, K., Kim, S., Kammura, W. and Iwami, M., Appl. Phys. Lett., 31 (1971) 611.Google Scholar
2 Hiraki, A., J. Electrochem. Soc., 129 (1980) 2262.Google Scholar